17 September 2008 Continuous phase plate polishing using magnetorheological finishing
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Abstract
Magnetorheological Finishing (MRF) techniques and tools have been developed to imprint complex, continuously varying topographical structures onto 430 x 430 millimeter optical surfaces. These optics, known as continuous phase plates (CPPs) are important for kilojoule- and megajoule-class laser systems requiring precise control of beam-shape, energy distribution and wavefront profile. MRF's sub-aperture polishing characteristics make it possible to imprint complex computer generated topographical information at spatial scale-lengths approaching 1 millimeter and surface peak-to-valleys as high as 22 micrometers to within 30 nanometers of design specifications. This paper presents the evolution of MRF imprinting technology for manufacturing large-aperture CPPs.
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M. Tricard, P. Dumas, J. Menapace, "Continuous phase plate polishing using magnetorheological finishing", Proc. SPIE 7062, Laser Beam Shaping IX, 70620V (17 September 2008); doi: 10.1117/12.797996; https://doi.org/10.1117/12.797996
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