Beam shaping of line generators based on high power diode lasers to achieve high intensity and uniformity levels

A. Bayer; J. Meinschien; T. Mitra; M. Brodner

doi:10.1117/12.794943

12 September 2008 Beam shaping of line generators based on high power diode lasers to achieve high intensity and uniformity levels

A. Bayer, J. Meinschien, T. Mitra, M. Brodner

Author Affiliations +

Proceedings Volume 7062, Laser Beam Shaping IX; 70620X (2008) https://doi.org/10.1117/12.794943
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

Beam shaping improvements of line generators based on high power diode lasers in combination with newly designed and produced high precision micro-optics lead to new applications such as hardening, metallization and annealing of different materials. Two aspects are mainly needed to be focused on for getting the best results and throughput in these applications. The first one is the overall power content along the narrow axis of the line, namely the peak intensity in combination with the beam shape. The second one is the intensity homogeneity along the long axis of the line. Herewith, a beam shaping concept that fulfils the desired requirements in a variable modality is presented. The concept consists of macro-lenses and newly designed micro-optics and results in a passively cooled high power diode laser emitting at 808nm. The laser has an output power of 1000W. The generated line has a length of 13mm and a width of <100μm at a remarkably large working distance of about 80mm. We attained an intensity distribution along the line length with a peak power density >80kW/cm² and uniformity >97%. To achieve such an extraordinary homogeneity level, several approaches based on cylindrical lens arrays were designed and tested. Methods to reduce inhomogeneities caused by diffraction effects and effects based on geometric optics are presented as well as their results. Additionally, the potential of this concept with regard to modularity, expandability and variability is reviewed. Finally, an application example - crystallisation of a thin film of a-Si on a glass substrate - is presented.

Citation Download Citation

A. Bayer, J. Meinschien, T. Mitra, and M. Brodner "Beam shaping of line generators based on high power diode lasers to achieve high intensity and uniformity levels", Proc. SPIE 7062, Laser Beam Shaping IX, 70620X (12 September 2008); https://doi.org/10.1117/12.794943

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