Real-time vibration amplitude and phase imaging with heterodyne interferometry and correlation image sensor

Seichi Sato; Toru Kurihara; Shigeru Ando

doi:10.1117/12.794168

11 August 2008 Real-time vibration amplitude and phase imaging with heterodyne interferometry and correlation image sensor

Seichi Sato, Toru Kurihara, Shigeru Ando

Author Affiliations +

Proceedings Volume 7063, Interferometry XIV: Techniques and Analysis; 70630I (2008) https://doi.org/10.1117/12.794168
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

We propose a new out-of-plane vibration imaging technique for micro-structured solid-state devices such as MEMS (microelectro mechanical systems) microphones and resonators. This technique is based on the longitudinally scanning optical interferometry and an integrated image sensor device which we call the correlation image sensor (CIS). The CIS is able to extract an arbitrary frequency component from time-varying incident light and produce a complex correlation image including amplitude and phase in addition to a conventional intensity image. In heterodyne interferometry of vibrating objects, the vibration information is encoded in several frequency components generated by mutual modulation of longitudinal scan and vibration. In this paper, the combination of newly developed multi-channel CIS and the scanning heterodyne technique enable us to obtain the multiple frequency components simultaneously and reconstruct the vibration amplitude and phase distributions in real time. As an example, vibration modes of a MEMS acoustic sensor are shown to be rconstructed at video rate. A theoretical possiblitiy for the imaging of higher than GHz vibration combining other optical heterodyne techniques is also discussed.

Citation Download Citation

Seichi Sato, Toru Kurihara, and Shigeru Ando "Real-time vibration amplitude and phase imaging with heterodyne interferometry and correlation image sensor", Proc. SPIE 7063, Interferometry XIV: Techniques and Analysis, 70630I (11 August 2008); https://doi.org/10.1117/12.794168

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