11 August 2008 New algorithms and error analysis for sinusoidal phase shifting interferometry
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An alternative to the conventional linear phase shift in optical testing interferometers is a sinusoidal phase shift, which has the benefit of relaxing requirements on the phase-shifting mechanism. We propose new phase-demodulation algorithms and provide sensitivity analyses to random noise, nonlinearity, vibrations and calibration error to demonstrate that sinusoidal phase shifting can be as robust and computationally efficient as the more established linear phase-shift techniques.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter J. de Groot, Peter J. de Groot, Leslie L. Deck, Leslie L. Deck, } "New algorithms and error analysis for sinusoidal phase shifting interferometry", Proc. SPIE 7063, Interferometry XIV: Techniques and Analysis, 70630K (11 August 2008); doi: 10.1117/12.795346; https://doi.org/10.1117/12.795346


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