11 August 2008 Transparent film profiling and analysis by interference microscopy
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Abstract
A white-light interferometer with new signal analysis techniques provides 3D top surface and thickness profiles of transparent films. With an additional change from conventional object imaging to pupil-plane imaging, the same instrument platform provides detailed properties of multilayer film stacks, including material optical properties. These capabilities complement conventional surface-topography measurements on the same platform, resulting in a highly flexible tool.
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Peter J. de Groot, Peter J. de Groot, Xavier Colonna de Lega, Xavier Colonna de Lega, Martin F. Fay, Martin F. Fay, } "Transparent film profiling and analysis by interference microscopy", Proc. SPIE 7064, Interferometry XIV: Applications, 70640I (11 August 2008); doi: 10.1117/12.794936; https://doi.org/10.1117/12.794936
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