11 August 2008 Accurately measuring a surface by using a computer-generated hologram
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Abstract
By using a CGH test plate fabricated with our equipment and techniques, we measured a perfect sphere surface. The measurement result is quantified into four parts: the figure error from the spherical surface under test; the figure error from the spherical reference surface; the error from hologram and the adjustment error from misalignment. The measurement result removed from the later three errors, shown excellent agreement with Zygo test of the same sphere surface. This verified that the measurement accuracy by using this kind of CGH could be very high.
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Hua Liu, Hua Liu, Zhenwu Lu, Zhenwu Lu, Honxin Zhang, Honxin Zhang, } "Accurately measuring a surface by using a computer-generated hologram", Proc. SPIE 7064, Interferometry XIV: Applications, 70640P (11 August 2008); doi: 10.1117/12.793597; https://doi.org/10.1117/12.793597
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