11 August 2008 Far-infrared Fizeau interferometer for large aspheric mirror
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The design and system performance of a far-infrared interferometer with which to test rough aspheric surfaces are presented. It is based on the optical configuration of classical Fizeau interferometer. A CO2 laser is used as a light source operating at a 10.6μm wavelength. A He-Ne laser is introduced into the interferometer to solve problems concerning with alignment. The measuring error(RMS) of the interferometer is less than λ/200(λ=10.6μm), this accuracy is able to fulfill the need of grinding primary mirror.
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Yongqian Wu, Yongqian Wu, Yudong Zhang, Yudong Zhang, Fan Wu, Fan Wu, Qiang Chen, Qiang Chen, Lianghong Li, Lianghong Li, } "Far-infrared Fizeau interferometer for large aspheric mirror", Proc. SPIE 7064, Interferometry XIV: Applications, 70640S (11 August 2008); doi: 10.1117/12.794415; https://doi.org/10.1117/12.794415


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