29 August 2008 Utilization of the Scheimpflug-principle in scatterometer design
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Abstract
In previous papers the basic problem of imaging the scatter distribution of an aperture by means of catadioptrical scatterometrical devices has been shown to be reducible to the imaging of the caustic of the--preferably elliptical--mirror used as primary element. In an geometrical-optical approach this caustic is the object to be mapped onto a planar sensor by a secondary imaging optical device. Since the caustic is not a plane object, care has to be taken for the field of depth of the secondary optics. While in symmetrical alignments the caustic's area of interest is usually flat enough to be treated as a plane perpendicular to the optical axis, in so called off-axis devices the violation of the conditions known as Scheimpflug- and Hinge-principles become remarkable. Similar problems occur with the primary aperture image in dioptrical devices. The current paper deals with an extended geometrical-optical approach to non-goniometric scatterometer design, suitable for highly unsymmetrical and off-axis devices.
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Cornelius Hahlweg, Hendrik Rothe, "Utilization of the Scheimpflug-principle in scatterometer design", Proc. SPIE 7065, Reflection, Scattering, and Diffraction from Surfaces, 706507 (29 August 2008); doi: 10.1117/12.794939; https://doi.org/10.1117/12.794939
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