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29 August 2008 Analysis of the uniqueness of an inverse grating characterization method
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Abstract
We propose a method for the characterization of one- and two-dimensional diffraction gratings by means of the measurement of diffraction efficiencies. The method is based on the comparison of measured and calculated efficiencies. For the numerical calculation we use the Rigorous Coupled Wave Analysis RCWA and an optimization algorithm to determine the grating shape that fits best to the measured data. We analyzed in which cases the method is able to determine the grating shape without ambiguity and which measurement parameters should be used. By systematically analyzing a given inverse problem, we try to derive the theoretical limits of the method.
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Bastian Trauter, Jochen Hetzler, and Karl-Heinz Brenner "Analysis of the uniqueness of an inverse grating characterization method", Proc. SPIE 7065, Reflection, Scattering, and Diffraction from Surfaces, 70650T (29 August 2008); https://doi.org/10.1117/12.793688
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