29 August 2008 Determining thickness of films on a curved substrate by use of ellipsometric measurement
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Abstract
The three intensity polarizer-sample-analyzer imaging ellipsometry is used to measure the ellipsometric parameters (&PSgr;,&Dgr;). In addition to the ellipsometric parameters, we introduce an extra angle &agr; to measure the of the azimuth deviation of polarizer. After careful calibration, we found this deviation can indicate how much the surface normal slanted from the plane; then it can be used to deduce the thickness profile coated on a cylindrical lens. Using this technique, we not only can determine the radius curvature of the curved surface, we also can calculate the thickness of the thin film coated on a curved surface.
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Chien-Yuan Han, Chien-Yuan Han, Zhen-You Lee, Zhen-You Lee, Yu-Faye Chao, Yu-Faye Chao, } "Determining thickness of films on a curved substrate by use of ellipsometric measurement", Proc. SPIE 7065, Reflection, Scattering, and Diffraction from Surfaces, 706516 (29 August 2008); doi: 10.1117/12.794178; https://doi.org/10.1117/12.794178
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