Geometric errors in 3D optical metrology systems

Kevin Harding; Chris Nafis

doi:10.1117/12.792552

29 August 2008 Geometric errors in 3D optical metrology systems

Kevin Harding, Chris Nafis

Proceedings Volume 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI; 706603 (2008) https://doi.org/10.1117/12.792552
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

The field of 3D optical metrology has seen significant growth in the commercial market in recent years. The methods of using structured light to obtain 3D range data is well documented in the literature, and continues to be an area of development in universities. However, the step between getting 3D data, and getting geometrically correct 3D data that can be used for metrology is not nearly as well developed. Mechanical metrology systems such as CMMs have long established standard means of verifying the geometric accuracies of their systems. Both local and volumentric measurments are characterized on such system using tooling balls, grid plates, and ball bars. This paper will explore the tools needed to characterize and calibrate an optical metrology system, and discuss the nature of the geometric errors often found in such systems, and suggest what may be a viable standard method of doing characterization of 3D optical systems. Finally, we will present a tradeoff analysis of ways to correct geometric errors in an optical systems considering what can be gained by hardware methods versus software corrections.

Citation Download Citation

Kevin Harding and Chris Nafis "Geometric errors in 3D optical metrology systems", Proc. SPIE 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI, 706603 (29 August 2008); https://doi.org/10.1117/12.792552

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