2 September 2008 Probabilistic method for multiparameter tolerancing in illuminator design
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Abstract
In precision optical instruments, it is often the case that aspects of the illumination system pupil--such as ellipticity, telecentricity, and partial coherence--relate directly to image resolution and placement accuracy. Standard design and analysis tools are often ill-suited to performing tolerance analyses on illuminators, since the figures-of-merit in terms of system performance do not reduce neatly to wavefront and distortion, as they often do for imaging optics. In order to address these deficiencies, we developed a multiparameter tolerancing method based on a probabilistic treatment of errors in an illumination system, and we will describe the work we have done in this paper.
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Stan Smirnov, Stan Smirnov, Eric Catey, Eric Catey, } "Probabilistic method for multiparameter tolerancing in illuminator design", Proc. SPIE 7068, Optical System Alignment and Tolerancing II, 706802 (2 September 2008); doi: 10.1117/12.795187; https://doi.org/10.1117/12.795187
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