2 September 2008 Closed-loop high-precision position control system with two modes
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Abstract
Based on fine optical grating and micrometer, one closed-loop high-precision position control system with two modes has been made. The system is used to control the optical elements moving in two ways. That is, one control mode is automatically control with optical grating feedback system and the other mode is manually control with micrometer. Under the support of conservative PID control algorithm, the precision of the system is up to ±0.1&mgr;m while operating on automatically way, otherwise, the position precision is ±1&mgr;m.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Cheng-liang Ge, Cheng-liang Ge, Guo-bin Fan, Guo-bin Fan, Zhi-wei Huang, Zhi-wei Huang, Zhi-qiang Liu, Zhi-qiang Liu, Zhen-dong Li, Zhen-dong Li, Jian-tao Wu, Jian-tao Wu, Min Wan, Min Wan, Xiao-yang Hu, Xiao-yang Hu, Zheng Liang, Zheng Liang, "Closed-loop high-precision position control system with two modes", Proc. SPIE 7068, Optical System Alignment and Tolerancing II, 70680O (2 September 2008); doi: 10.1117/12.792317; https://doi.org/10.1117/12.792317
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