2 September 2008 Data reduction of BSDF measurements from curved surfaces
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When measuring the BSDF of a surface, it is necessary to determine the instrument signature of the measurement device, which quantifies its intrinsic scatter with no sample present. For scatter angles near the specular beam, the equivalent BSDF of this signature is greater than the BSDF of the sample, and therefore the signature defines the minimum measurable scatter angle. For flat samples, the signature can be measured directly, but this is not possible for curved samples because the optical power of the sample changes the angular distribution of the signature. A method is described in K. A. Klicker et. al. [1] in which the signature of the device with a curved sample is determined using a raytracing simulation, however, few details of this simulation are given. Here we give the details of a simulation in which the instrument signature of a commercial scatterometer was modeled. We will show that this method is effective by comparing the modeled signature of a flat sample to the measured.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric C. Fest, Eric C. Fest, } "Data reduction of BSDF measurements from curved surfaces", Proc. SPIE 7069, Optical System Contamination: Effects, Measurements, and Control 2008, 70690K (2 September 2008); doi: 10.1117/12.792570; https://doi.org/10.1117/12.792570


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