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16 September 2008 Development, characterization and experimental performance of x-ray optics for the LCLS free-electron laser
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This manuscript discusses the development of reflective optics for the x-ray offset mirror systems of the Linac Coherent Light Source (LCLS), a 0.15-1.5 nm free-electron laser (FEL) at the Stanford Linear Accelerator Center (SLAC). The unique properties (such as the high peak brightness) of the LCLS FEL beam translate to strict limits in terms of materials choice, thus leading to an x-ray mirror design consisting of a reflective coating deposited on a silicon substrate. Furthermore, the physics requirements for these mirrors result in stringent surface figure and finish specifications that challenge the state-of-the-art in x-ray substrate manufacturing, thin film deposition, and metrology capabilities. Recent experimental results on the development, optimization, and characterization of the LCLS soft x-ray mirrors are presented in this manuscript, including: precision surface metrology on the silicon substrates, and the development of boron carbide reflective coatings with reduced stress and thickness variation < 0.14 nm rms across the 175-mm clear aperture area of the LCLS soft x-ray mirrors.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Regina Soufli, Michael J. Pivovaroff, Sherry L. Baker, Jeffrey C. Robinson, Eric M. Gullikson, Tom J. Mccarville, Peter M. Stefan, Andrew L. Aquila, Jay Ayers, Mark A. McKernan, and Richard M. Bionta "Development, characterization and experimental performance of x-ray optics for the LCLS free-electron laser", Proc. SPIE 7077, Advances in X-Ray/EUV Optics and Components III, 707716 (16 September 2008);

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