4 September 2008 CdTe x-ray image sensor driven by field emitter array
Author Affiliations +
A novel CdTe X-ray image sensor, which was driven by the FEA, was proposed in order to obtain high spatial resolution X-ray images and have demonstrated the principle operation by using the CdTe image sensor with one pixel. We have also fabricated a FEA matrix with 12x12 pixels to obtain X-ray images. For the further improvement of spatial resolution in the CdTe image sensor, we have proposed a novel double-gated FEA with a focusing lens, which was fabricated by using the etch-back method. The double-gated FEA showed a good focusing characteristic without significant decrease of the emission current, when the height of the focus electrode was optimized. The CdTe image sensor driven by the double-gated FEA is promising for an ultra-high-resolution X-ray image sensor.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Toru Aoki, Toru Aoki, Takuya Sakata, Takuya Sakata, Yuichiro Hanawa, Yuichiro Hanawa, Masashi Nakagawa, Masashi Nakagawa, Hisashi Morii, Hisashi Morii, Akifumi Koike, Akifumi Koike, Yoichiro Neo, Yoichiro Neo, Hidenori Mimura, Hidenori Mimura, } "CdTe x-ray image sensor driven by field emitter array", Proc. SPIE 7079, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics X, 707912 (4 September 2008); doi: 10.1117/12.795654; https://doi.org/10.1117/12.795654


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