19 August 2008 A large area reconfigurable MOEMS microshutter array for coded aperture imaging systems
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Coded aperture imaging has been used for astronomical applications for several years. Typical implementations used a fixed mask pattern and are designed to operate in the X-Ray or gamma ray bands. Recently applications have emerged in the visible and infra red bands for low cost lens-less imaging systems and system studies have shown that considerable advantages in image resolution may accrue from the use of multiple different images of the same scene - requiring a reconfigurable mask. Previously we reported on the early feasibility of realising such a mask based on polysilicon micr-opto-electromechanical systems (MOEMS) technology and early results in the visible and near IR bands. This employs interference effects to modulate incident light - achieved by tuning a large array of asymmetric Fabry-Perot optical cavities via an applied voltage whilst a hysteretic row/column addressing scheme is used to control the state of individual elements. In this paper we present transmission results from the target mid-IR band (3-5μm), compare them with theory and describe the scale up from a 3x3 proof-of-concept MOEMS microshutter array to a 560 x 560 element array (2cm x 2cm chip) with the associated driver electronics and embedded control - including aspects of electronic design, addressing control and integration. The resultant microsystem represents a core building block to realise much larger reconfigurable masks using a tiled approach with further integration challenges in the future.
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Mark E. McNie, Mark E. McNie, David O. King, David O. King, Nicola Price, Nicola Price, David J. Combes, David J. Combes, Gilbert W. Smith, Gilbert W. Smith, Alan G. Brown, Alan G. Brown, Neil T. Gordon, Neil T. Gordon, Steven M. Stone, Steven M. Stone, Kevin M. Brunson, Kevin M. Brunson, Keith L. Lewis, Keith L. Lewis, Christopher W. Slinger, Christopher W. Slinger, Stanley Rogers, Stanley Rogers, } "A large area reconfigurable MOEMS microshutter array for coded aperture imaging systems", Proc. SPIE 7096, Adaptive Coded Aperture Imaging and Non-Imaging Sensors II, 70960D (19 August 2008); doi: 10.1117/12.794996; https://doi.org/10.1117/12.794996

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