Programmable optical microshutter arrays for large aspect ratio microslits

S. Ilias; F. Picard; C. Larouche; R. Kruzelecky; W. Jamroz; L. Le Noc; P. Topart

doi:10.1117/12.807187

12 August 2008 Programmable optical microshutter arrays for large aspect ratio microslits

S. Ilias, F. Picard, C. Larouche, R. Kruzelecky, W. Jamroz, L. Le Noc, P. Topart

Proceedings Volume 7099, Photonics North 2008; 70992D (2008) https://doi.org/10.1117/12.807187
Event: Photonics North 2008, 2008, Montréal, Canada

Abstract

Design, fabrication and characterization of a 16x1 programmable microshutter array are described. Each shutter controls the light transmitted through a microslit defined on the transparent substrate supporting the array. Two approaches were considered for the shutter array implementation: sweeping blades and zipping actuators. Simulation results and fabrication constraints led to the selection of the zipping actuators. The device was fabricated using a surface micromachining process. Each microshutter is basically an electrostatic zipping actuator having a curved shape induced by a stress gradient throughout the actuator thickness. When a sufficient voltage is applied between the microshutter and an actuation electrode surrounding the microslit area, the generated electrostatic force pulls the actuator down to the substrate which closes the microslit. Opening the slit relies on the restoring force due to the actuator deformation. Microshutter arrays were fabricated successfully. High light transmission through the slit area is obtained with the actuator in the open position and excellent light blocking is observed when the shutter is closed. Static and dynamic responses of the device were determined. A pull-in voltage of about 110 V closes the microslit and the response times to close and open the microslit are about 2 and 7 ms, respectively.

Citation Download Citation

S. Ilias, F. Picard, C. Larouche, R. Kruzelecky, W. Jamroz, L. Le Noc, and P. Topart "Programmable optical microshutter arrays for large aspect ratio microslits", Proc. SPIE 7099, Photonics North 2008, 70992D (12 August 2008); https://doi.org/10.1117/12.807187

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