Studies Of Excimer Laser Etching Mechanism Using Laser Induced Fluorescence Measurements

R. W. Dreyfus; Roger Kelly; R. E. Walkup; R. Srinivasan

doi:10.1117/12.937296

11 March 1987 Studies Of Excimer Laser Etching Mechanism Using Laser Induced Fluorescence Measurements

R. W. Dreyfus, Roger Kelly, R. E. Walkup, R. Srinivasan

Proceedings Volume 0710, Excimer Lasers and Optics; (1987) https://doi.org/10.1117/12.937296
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States

Abstract

Bombarding solid surfaces with intense 248 nm KrF* or 193 nm ArF* excimer lasers leads to rapid etching. The ejected material consists of atoms, diatomics and larger clusters. Using laser fluences near threshold so as to minimize perturbations due to gas-phase collisions and to laser-produced plasma, the energy distributions of the first two types of species were measured by laser-induced fluorescence (LIF). The species detected were Al, A10, C2 and CN. The results show that for a metallic-like material (graphite) the energies agree with a purely thermal mechanism for the vaporization. In distinct contrast to this, insulating materials (sapphire and polymers) display nonthermal energy distributions and point to a photochemical (bond-breaking) mechanism. Understanding these mechanisms is of interest to microelectronic circuit production techniques, to optical damage prevention, and to laser surgery.

Citation Download Citation

R. W. Dreyfus, Roger Kelly, R. E. Walkup, and R. Srinivasan "Studies Of Excimer Laser Etching Mechanism Using Laser Induced Fluorescence Measurements", Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); https://doi.org/10.1117/12.937296

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available