Optical and structural properties of Nb<sub>x</sub>Si<sub>y</sub>O composite films prepared by metallic co-sputtering process

Xinbin Cheng; Bin Fan; Haruo Takahashi; Zhanshan Wang

doi:10.1117/12.797162

25 September 2008 Optical and structural properties of Nb_xSi_yO composite films prepared by metallic co-sputtering process

Xinbin Cheng, Bin Fan, Haruo Takahashi, Zhanshan Wang

Author Affiliations +

Proceedings Volume 7101, Advances in Optical Thin Films III; 71011G (2008) https://doi.org/10.1117/12.797162
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

The optical and structural properties of Nb_xSi_yO composite films prepared by metallic co-sputtering process have been investigated. Compositional modulation of Nb_xSi_yO mixed films is controlled by changing the relative sputtering rates of metallic niobium and silicon. The deposited intermediate index films have been characterized by spectrophotometry. And the dependence of the refractive index on composition is examined and compared with different mixing models. A comparison is made between the mechanical properties of the discrete multilayer and the gradient-index filter. It is demonstrated that the gradient structure exhibits a higher mechanical strength and integrity. Moreover, two typical gradient-index filters have been designed and realized using Nb_xSi_yO composites. Their spectrum performances and microstructures are also presented.

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Xinbin Cheng, Bin Fan, Haruo Takahashi, and Zhanshan Wang "Optical and structural properties of Nb_xSi_yO composite films prepared by metallic co-sputtering process", Proc. SPIE 7101, Advances in Optical Thin Films III, 71011G (25 September 2008); https://doi.org/10.1117/12.797162

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