25 September 2008 Development of a hybrid monitoring strategy to the deposition of chirped mirrors by plasma-ion assisted electron evaporation
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Abstract
We report on a hybrid monitoring strategy, which makes use of quartz crystal monitoring and broadband optical monitoring data in application to the deposition of chirped mirrors for the near infrared spectral region. We present a short description of the basic monitoring concept, the experimental setup, and the data elaboration facilities of the developed optical monitoring system OptiMon. Although being flexible enough to be implemented into different types of deposition system, we focus here on the application of our monitoring system for coating preparation with Advanced Plasma Source (APS) assisted electron beam evaporation. Chirped mirrors have been prepared using SiO2 and Ta2O5 as low and high index materials, respectively. The layers are characterized by in-situ transmission spectroscopy, ex-situ transmission and reflection spectroscopy, and white light interferometry to determine the group delay dispersion GDD. Basing on characterization results, we demonstrate and discuss the relative benefits of the developed monitoring strategy.
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Olaf Stenzel, Steffen Wilbrandt, Norbert Kaiser, Dieter Fasold, "Development of a hybrid monitoring strategy to the deposition of chirped mirrors by plasma-ion assisted electron evaporation", Proc. SPIE 7101, Advances in Optical Thin Films III, 71011Y (25 September 2008); doi: 10.1117/12.799711; https://doi.org/10.1117/12.799711
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