Localized measurements of optical thickness variations in femtosecond trimmed structures

A. L. Lereu; F. Lemarchand; M. Lequime

doi:10.1117/12.797415

25 September 2008 Localized measurements of optical thickness variations in femtosecond trimmed structures

A. L. Lereu, F. Lemarchand, M. Lequime

Proceedings Volume 7102, Optical Fabrication, Testing, and Metrology III; 710203 (2008) https://doi.org/10.1117/12.797415
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

Currently, the utilization of high power ultrafast lasers to induce optical changes in structures for the purpose of locally drawing patterns with dimensions inferior to the diffraction limit is well-established and controlled. Using this technique, we aim to modify the refractive index and/or the geometrical parameters of an optical interferential filter composed of successive thin layers. This local optimization will then allow the improvement or tuning of the performances of the optical filters. Thereafter, it is necessary to characterize these local modifications to achieve the final response of the expected filter. In our work, we developed a dedicated optical system, based on Fabry-Perot interferometry, to measure optical thickness, ranging from 10^-3 to 10^-4, with a high spatial resolution (in the order of 5×5μm). We present here our preliminary results carried out on calibrated test samples.

Citation Download Citation

A. L. Lereu, F. Lemarchand, and M. Lequime "Localized measurements of optical thickness variations in femtosecond trimmed structures", Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710203 (25 September 2008); https://doi.org/10.1117/12.797415

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