25 September 2008 Profilometric characterization of DOEs with continuous microrelief
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Abstract
Methodology of local characterization of continuous-relief diffractive optical elements has been discussed. The local profile depth can be evaluated using "approximated depth" defined without taking a profile near diffractive zone boundaries into account. Several methods to estimate the approximated depth have been offered.
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V. P. Korolkov, V. P. Korolkov, S. V. Ostapenko, S. V. Ostapenko, R. V. Shimansky, R. V. Shimansky, } "Profilometric characterization of DOEs with continuous microrelief", Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710209 (25 September 2008); doi: 10.1117/12.797673; https://doi.org/10.1117/12.797673
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