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25 September 2008 Profilometric characterization of DOEs with continuous microrelief
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Abstract
Methodology of local characterization of continuous-relief diffractive optical elements has been discussed. The local profile depth can be evaluated using "approximated depth" defined without taking a profile near diffractive zone boundaries into account. Several methods to estimate the approximated depth have been offered.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. P. Korolkov, S. V. Ostapenko, and R. V. Shimansky "Profilometric characterization of DOEs with continuous microrelief", Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710209 (25 September 2008); https://doi.org/10.1117/12.797673
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