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26 September 2008 Optical inspection of micro-electromechanical systems
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Abstract
We report the results of utilization of wide-gap photorefractive sillenite crystals as adaptive photodetectors (AP) for optical inspection of micro-electromechanical systems. The operation principle of AP is based on two-wave mixing and non-steady-state photoelectromotive force effects in photorefractive crystals. The results of measurements of small vibration amplitudes and resonant frequencies of the diffusely scattering objects and micro-electromechanical systems are given. The presented adaptive interferometric systems are suitable for industrial applications.
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I. A. Sokolov, M. A. Bryushinin, P. M. Karavaev, S. H. Khan, and K-T-V. Grattan "Optical inspection of micro-electromechanical systems", Proc. SPIE 7102, Optical Fabrication, Testing, and Metrology III, 710210 (26 September 2008); https://doi.org/10.1117/12.797559
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