2 October 2008 A far infrared/terahertz micromechanical sensor based on surface plasmons resonance
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Abstract
This paper describes a new concept related to the bolometric micromechanical sensors for detecting far IR and THz radiation. We believe that this concept permits a low cost and ease of fabrication of large bi-dimensional array of sensors with an enhanced signal-to-noise ratio. The micromechanical sensor comprises a thermo-sensitive bi-material (multi-material) micro-cantilever beam with a selective absorber dedicated to far IR and THz radiation energy, and optical readout system based on surface plasmon resonance for detecting the bending of the micro-cantilever element. To increase the radiation detector sensitivity, the SPR phenomenon is used for cantilever deflection monitoring.
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J. Hastanin, J. Hastanin, Y. Renotte, Y. Renotte, K. Fleury-Frenette, K. Fleury-Frenette, J. M. Defise, J. M. Defise, S. Habraken, S. Habraken, } "A far infrared/terahertz micromechanical sensor based on surface plasmons resonance", Proc. SPIE 7113, Electro-Optical and Infrared Systems: Technology and Applications V, 71131C (2 October 2008); doi: 10.1117/12.799854; https://doi.org/10.1117/12.799854
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