Paper
13 June 2008 Optical investigations of macro- and microporous silicon antireflection coating
Janusz Jaglarz, Marek Lipiński, Pawel Karasiński
Author Affiliations +
Proceedings Volume 7120, Optical Fibers and Their Applications 2008; 71200D (2008) https://doi.org/10.1117/12.804515
Event: Optical Fibers and Their Applications 2008, 2008, Bialowieza, Poland
Abstract
The studies of undoped and p porous silicon -doped type micro and macro porous silicon (PS) prepared by chemical and electro-chemical etching are reported here. The optical reflectance and photoluminescence of samples obtained under different conditions have been investigated. The PS investigated samples exhibited photoluminescence (PL) and antireflection properties (ARS).
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Janusz Jaglarz, Marek Lipiński, and Pawel Karasiński "Optical investigations of macro- and microporous silicon antireflection coating", Proc. SPIE 7120, Optical Fibers and Their Applications 2008, 71200D (13 June 2008); https://doi.org/10.1117/12.804515
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KEYWORDS
Silicon

Picosecond phenomena

Etching

Reflectivity

Antireflective coatings

Luminescence

Wet etching

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