Improving contact and via process latitude through selective upsizing

C. Yuan; G. Abeln; B. Anthony; G. Chen; S. Robertson; P. Walker

doi:10.1117/12.801187

17 October 2008 Improving contact and via process latitude through selective upsizing

C. Yuan, G. Abeln, B. Anthony, G. Chen, S. Robertson, P. Walker

Proceedings Volume 7122, Photomask Technology 2008; 712223 (2008) https://doi.org/10.1117/12.801187
Event: SPIE Photomask Technology, 2008, Monterey, California, United States

Abstract

This paper describes a simple technique to improve the process latitude for contact and via printing. The technique applies a selective upsizing algorithm to the mask data during the mask preparation step. For each contact or via, the algorithm looks for available spaces by checking relevant layers near it. When spaces are available, selective edges of a contact or via will be sized to improve the process latitude. This paper describes algorithms used to implement this technique. Multiple designs of various design styles are used to demonstrate the effectiveness of the algorithms. The implications on mask preparation, mask making and wafer processing are also discussed.

Citation Download Citation

C. Yuan, G. Abeln, B. Anthony, G. Chen, S. Robertson, and P. Walker "Improving contact and via process latitude through selective upsizing", Proc. SPIE 7122, Photomask Technology 2008, 712223 (17 October 2008); https://doi.org/10.1117/12.801187

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available