19 March 2009 Optical and structural properties of Sb and Sb-rich SiSb thin films
Author Affiliations +
Proceedings Volume 7125, Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage; 71251V (2009) https://doi.org/10.1117/12.823427
Event: Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage, 2008, Wuhan, China
Abstract
Sb-rich SiSb thin film was recently reported as a promising phase change meromy material. In this paper, optical and structural properties of as-deposited amouphous and laser-annealed crystalline Sb-rich SiSb thin films are studied and compared with pure Sb thin film. Sb and Si15Sb85 thin films were deposited on polycarbonate substrates by magnetron sputtering. Laser initialization in pure Sb and Si15Sb85 thin films were performed with phase-change optical disc initializer. Reflectivity Spectrum and XRD analysis were performed on as-deposited and initialized Sb and Si15Sb85 thin films. The influence of Si doping on its optical and structural properties are discussed and qualitatively explained by a distorted structure model.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huan Huang, Yang Wang, Fuxi Gan, "Optical and structural properties of Sb and Sb-rich SiSb thin films", Proc. SPIE 7125, Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage, 71251V (19 March 2009); doi: 10.1117/12.823427; https://doi.org/10.1117/12.823427
PROCEEDINGS
5 PAGES


SHARE
Back to Top