A decoupled micro-electromechanical resonant gyroscope

Luda Wang; Shangchun Fan; Zhanshe Guo

doi:10.1117/12.806316

13 October 2008 A decoupled micro-electromechanical resonant gyroscope

Luda Wang, Shangchun Fan, Zhanshe Guo

Proceedings Volume 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence; 71270Y (2008) https://doi.org/10.1117/12.806316
Event: Seventh International Symposium on Instrumentation and Control Technology, 2008, Beijing, China

Abstract

This paper introduces a new decoupled micromachined gyroscope. It is based on resonant sensing of the Coriolis force, which has many advantages over rate gyroscopes that utilize displacement sensing for rotation rate measurement. These advantages include a quasi-digital FM (frequency modulation) output, high resolution, good linearity, and low noise. As a whole, the structure includes two proof masses, cantilevers, leverage mechanisms, DETF (double-ended tuning fork), driving and checking combs. The mechanical and model analyses of structure are carried out by ANSYS. At first, we have done the modal analysis in order to make sure the first modality of the structure is the working modality. At the same time, we change some parameters to let the frequencies of other interference modalities much higher than that of the working modality. Then, the harmonic analysis is made to get the information of the sensitivity of the structure. Verified from the simulation results, the sensor can successfully realize the purpose of decoupling.

Citation Download Citation

Luda Wang, Shangchun Fan, and Zhanshe Guo "A decoupled micro-electromechanical resonant gyroscope", Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 71270Y (13 October 2008); https://doi.org/10.1117/12.806316

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available