13 October 2008 Microstructure silicon force sensor and its simulation
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Abstract
This paper introduces an a practical silicon beam resonator attached to an E-type round diaphragm, which is used for measuring the concentrated force. Working principle of this sensor in introduced and relationship between the basic neutral frequency of the beam resonator and the concentrated force are analyzed and investigated. FEM (Finite Element Method) simulation is used to simulate the vibration features of the above beam resonant and the microsensor. Finally, based on the differential output mean, a set of optimum parameters of the above sensing unit is determined.
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Ali El Mahdi Mohamed, Ali El Mahdi Mohamed, Shangchun Fan, Shangchun Fan, Zhanshe Guo, Zhanshe Guo, } "Microstructure silicon force sensor and its simulation", Proc. SPIE 7127, Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Artificial Intelligence, 712712 (13 October 2008); doi: 10.1117/12.806327; https://doi.org/10.1117/12.806327
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