13 October 2008 Imaging and measurement techniques for three-dimensional microstructure by digital holographic microscopy
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Digital holography is an emergent imaging technique which provides complete three-dimensional information of an object. An off-axis Fresnel digital holographic system with pre-magnification is built. Experimental investigations have been performed for a USAF test target. By using four autofocusing algorithms the optimal recording distance of the recorded hologram is determined accurately. The experimental results show that the variance algorithm is the most effective one for digital holographic microscopy. Based on the obtained recording distance, the phase image of the investigated microscopic object is reconstructed accurately by associated applying the automatic phase aberration compensation procedure proposed by T.Colomb with the manual adjustment method. The lateral resolution with better than 2.38 μm and the axial resolution of 10nm has been achieved experimentally.
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Huaying Wang, Huaying Wang, Dayong Wang, Dayong Wang, Xiufa Song, Xiufa Song, Jie Zhao, Jie Zhao, } "Imaging and measurement techniques for three-dimensional microstructure by digital holographic microscopy", Proc. SPIE 7129, Seventh International Symposium on Instrumentation and Control Technology: Optoelectronic Technology and Instruments, Control Theory and Automation, and Space Exploration, 71290V (13 October 2008); doi: 10.1117/12.807367; https://doi.org/10.1117/12.807367

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