This PDF file contains the front matter associated with SPIE Proceedings Volume 7130, including the Title Page, Copyright information, Table of Contents, and the Conference Committee listing.

Laser interferometric methods are employed in precision measurements and positioning tasks, since they provide the means for attaining high metric resolution and precision, even over large measurement ranges. The most important fundamental principles of heterodyne and homodyne interferometers are discussed. A metrological analysis makes it possible to describe the advantages and limits of laser interferometry. The design and functionality of fibre-coupled miniature interferometers are described. The broad applicability of interferometers to microtechnology, nanotechnology and precision mechatronics is explained.

The crack length measurement method using an ion-sputtered film, proposed by the authors based on the change in the electric resistance of the film during the crack growth, was applied to the small crack growing in soda lime glass and alumina ceramics. Since the measurement system can record the electric resistance of the ion-sputtered film at a high sampling frequency of 125kHz, the crack lengths was measured almost continuously, and the relationship between the crack growth rate and the stress intensity factor were obtained in the whole regions from low crack growth rate to brittle fracture. The growth characteristics of the small crack under 1mm in alumina ceramics are clarified to be different from that of the large crack in the same materials; for example, the n values, which is defined as the constant in the Paris law relating the crack growth rate to the stress intensity factor, in the soda lime glass and the alumina ceramics obtained by this research are 74 to 96 and 530 to 580 respectively in the region I, and 12 to 15 and 17 to 25 respectively in the region II, that are different from the values obtained from a large crack, especially for the alumina ceramics.

The main content of assessing the machined surface quality of machine components is the geometrical properties of surface quality. The geometrical properties of the two assessing parameters of identical surface quality (surface roughness and surface waviness) exist in the identical substance and there are certain blend and fuzziness, what's more, there is not the concept of the value to describe its varying blend degree, there are, so far, still not practicable methods and measuring tools to separate surface roughness and waviness completely. In contrast, the paper is based on the membership function of fuzzy mathematics to research the geometrical properties of surface roughness and waviness. This method completely broke the traditional one that only adopts numerical values to separate surface roughness and waviness. It can not only directly separate the two assessing parameters from actual surface, measure the actual values of parameters that meet the assessing quality and obtain the actual probability of the blend compositions between the two, but also entirely evaluate the geometrical properties of the actual surface quality, moreover, there will be a quantitative evaluation for the authenticity and reliability of the measured values from measuring systems and instruments.

A practical method is introduced to measure the circular runout of a end-milling spindle system at high speed rotations without the need of a reference sphere. A workpiece is held on a linear slide which moves along the axial direction of the spindle. The spindle is then programmed to run at a specific speed. A very sharp edge cutter must be used and the depth of cut will be very shallow in order to keep the cutting force very small. The workpiece is then fed into the end mill in order to make a cutting mark of teens μm in depth. The cutting marks are circular, and their diameters are related to the circular runout of the spindle system. The cutting mark that is generated at a specific speed is expected to contain information about the spindle circular runout at this speed. In practice the cutting marks are not perfectly circular. Therefore, a best-fit circle of a cutting mark is needed to determine its diameter. A high-resolution edge detector machine is used for this purpose. Quantitative precision analysis was carried out to confirm the accuracy and repeatability of this new measurement technique. It is demonstrated that this technique for the measurement of spindle circular runout is an effective tool in verifying the actual running accuracy of spindles at their actual operating speeds and can be accomplished without the need for a reference sphere.

A replacement algorithm used in the calculation of roundness errors by a least regional fitting method has been proposed in this paper. Using the high fitting precision initial-value, which is calculated by the relative algebraic distance method, the replacement algorithm needs less iterations and has a higher calculation speed. Simulation tests show the higher fitting accuracy. The replacement algorithm by using computer programming is applied to measurement software of a universal tools microscope.

In accordance with the principle of Three-Line, this paper analyzed the correlation of every main parameter of internal screw thread, and then designed a device to measure the main parameters of internal screw thread. Basis on the measured value and corresponding formula calculation, we can get the internal thread parameters, such as the pitch diameter, thread angle and screw-pitch of common screw thread, terraced screw thread, zigzag screw thread and some else. The practical application has proved that this operation of this device is convenience, and the measured dates have a high accuracy. Meanwhile, the application of this device's patent of invention is accepted by the Patent Office. (The filing number: 200710044081.5)

To obtain the suspending state and position of object in opaque liquid is significantly important and there often meet many problems especially in the condition that suspending object will interact with the liquid. Traditional detection methods measurement accurate is too low or it's harmful to human health. One novel ultrasonic detect method was brought forward. Through analyzing the test environment and the features of ultrasonic test, positive and negative differential ultrasonic measure principle is presented. The experimental plat is setup and applied to secondary magnetic buoyancy object position measurement in the novel magnetic fluid inertial sensor. The results show that the secondary magnetic buoyancy position and its suspending state are accurately measured.

To improve dynamic measurement performance and resolution, an optimum design on two-dimensional (2D) micro-angle sensor based on optical internal-reflection method via critical-angle refractive index measurement is presented in the paper. The noise signals were filtered effectively by modulating laser-driven and demodulating in signal proceeding. The system's accuracy and response speed are improved further by using 16-bit high-precision AD converter and MSP430 CPU which present with a high-speed performance during signals processes such as fitting angle-voltage curve through specific arithmetic, full range and zero point calibration, filter, scaling transformation etc. The experiment results indicated that, dynamic signal measurement range can be up to ±600arcsec, the measurement resolution can be better than 0.1arcsec, and the repeatability could be better than ±0.5arcsec.

The standard of technology without an interesting name (TWAIN) was introduced and a displacement measurement method was presented. Based on the theories of image capture and image measurement, a displacement measurement system was developed and subpixel and centroid technique were used to improve the measurement precision. The Experiment results show that the proposed method has low cost and high precision.

The manufacture quality of hole of fiddly part with fit requirements doesn't only depend on the machining accuracy, but also depend on the measuring method of dimension. Traditional detecting instruments have the drawbacks of low commonality, accuracy and efficiency. However, the high-end instruments are always marked exorbitant price for the performance. This paper presents a taper measuring method for the hole of part. According to the pneumatic-to-current theory, this method translates dimensional variables of part's hole into the electric signals, and then, through collection of A/D data, acquire the dimension of part measured. Finally, the taper of part's hole will be calculated and analyzed by the computer software system. The method has the superiority in high accuracy, good credibility, strong anti-interference, high measure efficiency and intuitionistic result recognition.

Present-day large mobile objects such as the ships are equipped with a large number of different devices and systems whose mutual angular position must be known to a high degree of accuracy. Owing to static and dynamic deformations of the object, the angular position of peripheral apparatus such as optical systems, radar antennas , etc. may differ essentially from that of central devices. For removing the effects of angular deformation, suitable measurement methods should be studied. The problem of evaluation for angular deformation measurement particularly is becoming urgent for large-sized vehicles such as big ships, spacecrafts, etc. Fiber Bragg Grating (FBG) sensors can be used to measure many different parameters including strain, temperature, pressure, displacement, electrical field etc. With the major advantages which is attributed to wavelength-encoded information given by the Bragg grating, deformation measurement system based on FBG is briefly introduced. As strain measured by FBG sensor can be obtained, an angular deformation measurement method using strain information is proposed. Strain response modality model is deduced based on finite element method (FEM). Based on strain response modality model, experiment strain modality analysis is done and strain response calculation model can be set up. Then transformation between strain information and angle deformation is deduced, and the results comparison between using strain response analysis method and using ANSYS analysis method for simple ship deck structure under different loads is made. The simulation results show that angular deformation measurement method using strain response analysis is suitable to meet the measurement requirement.

This paper presents a novel way for the re-constructible CMM software system modeling by taking advantage of a tiered modeling strategy. It consists of four tiers: (1) the bottom layer is the CAD model manager which encapsulates geometric engine and 3D object displaying engine as a COM; (2) the middle is the kernel components which is designed to manage the objects of geometric entity, coordinate system, probe and the system environment parameters etc; (3) the third layer is function modules layer that is used to manage and handle the messages and events of the windows/dialog, menus and toolbars; (4) the top layer is GUI module that is designed to initialize the application with the resource of GUI with the manner of dynamic loading. A set of commercial CMM software, Direct DMIS, has applied the method in a R&D of China National Institute of Measuring and Test Technology (NIMTT). It proves that the developed system can effectively integrate the modules distributed in different layers developed with C++ or C# and the proposed method is feasible.

A novel automatically measuring planning method in coordinate metrology based on computer vision is presented in this paper. An active stereo vision system is established by attaching a CCD camera to the mechanical probe of the coordinate measuring machine (CMM). Through the movement of the probe of the CMM, as well as the camera, 3D edge characters of the object can be acquired, which are used as clues for automatically coordinate measuring. A multi-baseline matching method is presented to overcome the ambiguity in stereo matching, and a quadratic interpolating is used in sub pixel matching to get continuous depth image. The matching is only done on character edges in images, so it is much faster and more robust. Two methods of measuring path planning are put forward, in one way, a 2D characteristic edge image which are often stand for rapidly changes in depth or curvature of object surface can be acquired by projecting 3D edge characters to a scanning plane, and then the sampling points of mechanical probe are selected depending on the edge image. In the other way, surface patches are fitted to these 3D edges, and the sampling grid is determined by the type and area of every patch. Using these techniques, a highly automated high-speed, high-precision, 3-D coordinate acquisition system based on multiple-sensor integration can be developed. It has potential applications in manufacturing problems as metrology, inspection, and reverse engineering.

This paper calculates the theoretical tooth surface of spiral bevel gear and, using coordinate measuring machine, inspects the actual tooth surface, which provides an objective and quantitative method for inspecting the tooth surface of spiral bevel gears. For many reasons there are some deviations between the actual tooth surface and the theoretical tooth surface. Based on the differential geometry and space engagement theory, this paper deduces the analytical representation of theoretical tooth surface through the process of gear generation. After comparing the coordinates of the actual gear tooth surface and the theoretical tooth surface, a high-precision analysis graphics of tooth surface errors can be obtained by measuring date processing. A pair of aviation spiral bevel gears manufactured by Phoenix 800PG Grinding machine are inspected by Mahr measurement. The result of comparison of gear surface errors, inspected respectively by the method of this paper and by the Mahr's software, shows the consistency of the error distribution. The experiment verifies the validity and feasibility of the method presented in this paper.

An improved vision calibration method based on free-form surface polishing robot was presented in this paper. Contrary to the classical non-linear photogrammetric approach, the proposed technique can correctly find the solution without the stereo calibration pattern. In this method, a more comprehensive camera model was adopted which based on the pinhole model, extended with radial distortions, decentering distortion and thin prism distortions correction. Take over twenty images of the model plane under different orientations by moving the plane and then detect the corner points in the image, and all intrinsic parameters and extrinsic parameters solving by optimization methods. Real data have been used to test the proposed method and the good results have been obtained. In the process of calibration, calibration precision is improved by freely moving the planar pattern in the space. The excellent performance of the proposed technique, such as convergence, accuracy and robustness, was demonstrated.

The dynamic error sources of CMM were analyzed and the character of the dynamic error data was investigated in this paper. Based on the character, the dynamic error model of CMM was built by using Bayesian statistical principle combined with the standard quantity interposition method. The specific error model building procedures was deduced. The CMM dynamic error separating and contrasting experimental devices were designed by using the laser interferometer and the measuring block group. The theoretical analysis and the experiment result indicate that all influences of the CMM dynamic error sources is considered in the model building method by using Bayesian statistical principle combined with the standard values interposition method which meets the CMM working condition. The error model accuracy reaches 2.4 μm and meets the CMM demand. The needed error data size is greatly reduced by using the dynamic error model building method. The error separating principle by lapping-in the measuring block group is simple, which is implemented easily and meets the timing dynamic error correcting needs of the ordinary CMM user.

Path planning and surface fitting are the key technologies in the non-axisymmetric aspheric measuring. In accordance with the requirements of high-precision compensation machining for parallel grinding of non-axisymmetric aspheric lens, in this paper, measuring paths are planned based on the machining error. The measuring system is designed and carried out. The nonlinear least square fitting method is adopted in surface fitting for the non-axisymmetric aspheric lens and the surface quality of optical lens is effectively estimated by the fitting error. The experiment result indicates that the fitting residual error is in the 10^-3mm magnitude order, which can meet the request of compensation machining. By comparing with the theory equation, the original data for compensation machining can be obtained, and the accuracy of compensation machining is well controlled.

A four-degree-of-freedom gyroscope dynamical model is presented to improve the performance of a tuning fork vibratory MEMS gyroscope. The effects of the driving and sensing micromachined spring beams for the performance of the gyroscope are investigated. Two new types of micromachined spring beams named the "two-sect" driving and "three-sect" sensing spring beams are designed and their stiffness equations are deduced. The evaluation function of the dynamic performance of the gyroscope with improved suspension system can be obtained. A numerical example with finite element analysis for comparison is employed to validate the dynamical analysis. The result shows that the optimized gyroscope has good robustness and high sensitivity. The work is not only suitable for the tuning fork vibratory MEMS gyroscope, but also has an important reference value for other MEMS design of products.

Conventional Coordinate Measuring Machines (CMMs) restrict the possibilities for measuring micro mechanical products and noncontact optical measuring methods are not suitable for true three-dimensional measurements. The integrated combination of optical sensors and mechanical transducers employed in this research makes an ideal low cost and high precision touch trigger probe possible to measure miniature components. This touch probe is composed of a stylus with a fiber sphere (310μm in diameter) and a sensor integrated floating plate. The ball tip is fabricated using optical fiber with melting and solidification processes. The stylus is attached to a floating plate, which is connected to the probe housing via four micro wires. The shape and dimension of the floating plate, as well as the length and diameter of the micro wire, are determined according to the selected contact forces. When the probe tip is displaced the wires will perform elastic deformation and four mirrors mounted onto the four-legged plate will amplify the up/down displacement at each mirror position. These displacements can be detected by four corresponding laser focus probes. Experiments were carried out to test the unidirectional touch trigger repeatability. The standard deviation is less than 10nm. The probe structure and the experimental results were also analyzed and validated with finite element AnSYS software.

The purpose of this study is to research and produce water-base nano-PU paint with energy conservation, environmental consciousness and high efficiency of heat insulation, which can be enhance the traditional PU paint for performance improvement of heat insulation and range of application. In this study, research will be held on the two-stage synthesis method. The SiO2 nanoparticles are added into the water-base PU paint to improve the properties of traditional PU paint. Next, the fundamental properties of this paint, including water resistance, weather rsistance, weak acid solvent resistance, and heat insulation rate, will be measured and analyzed, and the performance of heat insulation will be evaluated in order to confirm the performance and practicability of the heat insulation of water-base nano-PU paint in this study. The experimental results show that for the SiO2/W-PU composite nanopaint prepared by two-stage synthesis method, the dispersion of SiO2 powder in the water-base PU (W-PU) paint is even. For the SiO2/W-PU nanocomposite paint prepared by adding SiO2 powder at 8% wt. to the marketed water-base PU, the water absorption of its experimental sample is enhanced by around 10.1 times, whereas its weak acid dissolve erosion rate is increased by 3.3 times. However, the average heat insulation rate in the thermal properties is also increased, increasing around 24.22% for the W-PU paint without SiO2 powder. Through the multilayered coating construction, the water-base nano-PU paint added with SiO2 powder can be used on any facility of heat insulation, including vehicle, safety helmet, umbrella, drapes, and outer wall of building. The newly developed water-base nano-PU paint with high thermal resistance is especially suitable for application to the shell coating of air conditioner and cooling tower,. Due to the better thermal resistance of this nanopaint, the problems of poor heat transfer and temperature rise of cooling water caused by direct sunlight can be improved. This is of great help to the energy conservation of air conditioning system.

As new engineering coatings get ever thinner and more technologically advanced, there is an increasing demand for accurate assessment of the mechanical properties of the thin films, for instance ultra-thin carbon layers on magnetic heads, electronic pads for MEMS and LB films. The rapidly expanding field of depth-sensing evaluation and techniques related provides a quantitative method for mapping the micro mechanical properties. A new type of nano test system was introduced, the technology principle and the data analysis metho0d were described. It was used to test the performance of thin films on silicon wafer, steel and glass prepared by many kinds of technologies, this included nanoindentation, to evaluate the mechanical properties, such as hardness, elasticity modulus, and nanotopography to test the thickness and roughness, and nanoscratch to investigate the scratch resistance as well as the deformation and failure behaviour of the films. The results show that nanoindentation and nanoscratch techniques are very useful tools in charactering the performance of thin films in nano scale.

An investigation of diffuser/nozzle micropumps is presented. Numerical simulations are done using CFD program ANSYS/Flotran. The simulations show when the opening angel is small, the flow in the diffuser/nozzle is steady, the mass flow is increasing with the adding opening angle. But when the opening angel continues increasing, the pressure grads will be bigger than zero. It means that the static pressure is gradually going up along the diverging direction. The fluid near the wall stops flowing because the velocity decreases rapidly and the dynamic pressure is not big enough to overcome the increasing of the static pressure. Finally the fluid flows reversely from the backward position of higher pressure area, this makes the separation flow of fluid, the diffuser is full of reverse fluid. And this results in the dropping of mass flow at last. The simulations also show that the performance of diffuser with a round inlet is better than that with a sharp inlet. The mass flow of micropumps with different opening angles, different inlets are measured. The experimental results agree well with the simulations.

PMMA(Polymethylmetacrylate), PC(Polycarbonate) and PS(Polystyrene) are the most frequently used polymer resist for thermal nanoimprint lithography (T-NIL), and moreover they are suitable for optical devices according to their well-known high transparency and excellent optical performance. In present research, thermal and mechanical properties of these three polymers were investigated with the home-made six-axis micro-tester. From the data of test, it is found that temperature, pressure and embossing time demonstrate crucial effect on imprinting process. Whereafter, nano-gratings of PMMA, PC and PS which were imprinted by the home-made NIL prototype show finer pattern fidelity, uniformity and demoulding quality. Consequently, we believe that PMMA, PS and PC possess great potential to be manufactured as polymer-based MEMS and MOEMS devices by nanoimprinting directly apart from being photoresists for thermal-nanoimprint.

The nature of the surface topography significantly influences its functional performances, such as the lubrication, wear, friction, corrosion, fatigue, et al. Therefore, the need for accurate surface metrology is becoming more and more important. This paper introduces a high-precision 3D profilometer for surface metrology with the characteristic of high resolution, long measure range and low cost. The 3D profilometer consists of several parts: the micro-displacement sensor based on linear phase grating interference, the X-Y 2D platform, the column, the optoelectronic detector and its signal processing circuit, the computer and data processing software. The precise linear motion of the displacement sensor is implemented by parallel springs and its high precise displacement measurement is realized by sine phase diffraction grating. The theoretical vertical resolution of the micro-displacement sensor may achieve 0.12 nm, and the actual measuring range of the displacement sensor is 2mm, which can reach 6mm by replacing the measuring lever. The 2D platform is driven by servo motor and the double diffraction grating metrology system is adopted to measure the position of the platform. The resolution step displacement of the 2D platform is 0.2um.

Scanning tunneling microscope (STM), since it appearance has become an essential tool for investigate and fabricate in nano scale. It's required a long-term stability of the tip-sample tunnel junction to maintain the high resolution. Focus on this point, a great deal of effort has been devoted to improve the performance of the stability of the STM working state. The designed system run in a feedback closed-loop by implementing in a digital signal processor(DSP), in which real-time output is calculated through proper control algorithm to response to the environment noise. It shows a good effect in experiment in Nano-vibration isolation.

Micromachined accelerometers are one of the most widely used MEMS transducers. The theory of force-balance MEMS accelerometers is presented in the thesis. Meanwhile the paper accomplishes the system-level simulation and analysis of the force-balance MEMS accelerometer with different structure parameters. Based on the analysis, the conclusion is that the parameters of folded-spring (such as the length of the beam, the width of the beam) especially influence the output sensitivity.

Micro-cantilever structure is flexible and liable to be destroyed compared its volume with its area. Failure mode and effect analysis can be predicted at an early stage of the micro-beam design. Stiction is a main failure mode for cantilever in its manufacture process and operation. Under the load shock, if the contact length reached the limit length, the restoration energy in micro-cantilever couldn't resist the stiction energy, the micro-cantilever would stiction on the substrate. Pull-in was a main failure mode for electrostatic micro-cantilever. The pull-in voltage was obtained by mechanical and electrical couple analysis on the base of the FEM model.

The horizontal magnetometer is a new type of magnetometer whose distinguish feature is that the Lorentz force reflecting the varieties of the magnetic intensity shares a common plane with the sensing component. This essay introduces its Structure and the results of the FEA analysis and test. The testing results indicate that the headers were capable of sensing the magnetic signal and satisfying the tunneling effect.

Using analyse method of state variable which is independent of system's inputs and outputs, the paper presents a method to solve the difficult problem of dynamic measurement system modeling on a X-Y working table. Employing this method, model on one guiding system of x-y working table is established. Transfer function of the model is calculated. Signal transfer diagram between components of the system is also presented. The analysis results indicate that analyse method of state variable is useful to modeling on complex system and helpful for understanding the information inside the system.

Two groups of indicated grating and scale grating produce two groups of first order Moire fringe. Two groups of first order Moire fringe interfere and produce second order Moire fringe, and then we can use the four-phase photoelectric sensors to get two channels of enlarged second order Moire fringe's sine wave signal, their phase difference is π/2. Based on chips of QA740204 and QA740210, this paper designs the 20 times subdivide circuit to achieve the nano-measurement resolution and when the grating's move speed closes to the limit value or exceeding the limit value, the critical state alert and overspeed alert circuit can be provided in measuring.

Most of Micro-fabrication technologies are one complex process. The final machining precision and forming quality of the 3D microstructures are decided not only by the movement and control performance of the machining system, but also by various outside condition factors. Through real-time monitoring the machining process and eliminating the technical error, the fabricating successful rate and completing rate will be improved. In this paper, one process monitoring system based on Machine Vision is presented to be used in one Femtosecond laser micro-fabrication system. According to the technic characteristic, point to point and layer to layer molding, two monitoring strategies are put forwarded respectively to different machining process. Single cell point image is used to judge the laser solidified result through the Support Vector Machine and the machining precision can be promised. The layer image is used to be compared with the design locus and the forming quality of the 3D microstructure can be gained. Whole vision monitoring system is built with the Virtual Instrument development condition, Labview. The image obtaining and process are both realized by software, this decreases the system developing cost. The strategy of the vision monitoring system is also applicable for other micro-fabrication system.

In recent years, one of the most attractive research areas in human-robot interaction is automated facial expression recognition. Through recognizing the facial expression, a pet robot can interact with human in a more natural manner. In this study, we focus on the facial pose-variant problem. A novel method is proposed in this paper to recognize pose-variant facial expressions. After locating the face position in an image frame, the active appearance model (AAM) is applied to track facial features. Fourteen feature points are extracted to represent the variation of facial expressions. The distance between feature points are defined as the feature values. These feature values are sent to a support vector machine (SVM) for facial expression determination. The pose-variant facial expression is classified into happiness, neutral, sadness, surprise or anger. Furthermore, in order to evaluate the performance for practical applications, this study also built a low resolution database (160x120 pixels) using a CMOS image sensor. Experimental results show that the recognition rate is 84% with the self-built database.

The development of a flexible 8x8 temperature and tactile sensing array, which will serve as the artificial skin for robot applications, is presented in this work. Pressure conductive rubber is employed as the tactile sensing material, and discrete temperature sensor chips are employed as the temperature sensing cells. Small disks of pressure conductive rubber are bonded on pre-defined interdigital copper electrode pairs which are patterned on a flexible copper-PI substrate which is fabricated by micromachining techniques. This approach can effectively reduce the crosstalk between each tactile sensing element. The mechanical and electrical properties of tactile sensing elements are measured. Also, scanning circuits are designed and implemented. The temperature and tactile sensing elements are heterogeneously integrated on the flexible substrate. By using the integrated 8x8 sensing arrays, temperature and tactile images induced by the heaters/stamps of different shapes have been successfully measured. Radio-frequency (RF) wireless modules are also developed and integrated on the skin system.

Thickness of thin film measurement is a important information for the TFT-LCD and semiconductor process, ranging from spectro-photometry to interferometry. In particular many efforts have been devoted for development of measurement system to obtain thickness and surface profile. In this paper, we propose a new method by using wavelet transform to retrieve the phase information, and we demonstrate, with both theoretical and experimental data, that this method provides a reliable technique for retrieving phase in the wavelength scanning interferomety. Also we show that the proposed method can reconstruct the non linear phase better than other methods such as the conventional fourier transform and direct spectral phase calculation method. In the experimental data, we verify that the error of measurement using proposed method is less than those other methods. The patterned thin film is measured with the proposed method to obtain the thickness profile and surface profile simultaneously, demonstrating higher accuracy and performance.

Differential absorption and harmonic detection techniques are always used to eliminate the intensity fluctuation and optical path interference. However, the cross-talk of gases is not eliminated. For this problem, a correlation spectroscopy method is proposed. In this paper, we analyze the theory of the system in detail. A method for methane gas sensing using a 1.6um LED as a light source is demonstrated based on the analysis of the near infrared spectral absorption of methane as well as the factors such as compatibility with the transmission characteristics of silica optical fiber and the price. The experiment result is shown and proves that the proposed method is practical for both theory and experiment within the error. The repeatability and stability are well. The method inherits the excellence of the traditional correlation spectroscopy, which has high selective characteristics. It can eliminate cross-talk of carbon dioxide etc. Then the sensitivity of the methane detection is enhanced. The system can be used to detect other gases by changing source, so it is general.

In this article, an innovative micro-actuator based on photo-thermal heating is introduced. The basic ideas are to apply a new way to get large actuation power from laser source. When a beam of laser irradiates a thin sheet, the sheet temperature increases and volume expands. Besides irradiation laser power, convection coefficient and the parameters of sheet material, the length-width ratio of sheet also influences the heating process. Applying this characteristic, an asymmetric photo-thermal actuator was manufactured by the excimer laser micromaching system. Steady-state thermal analysis is presented. Feasibility experiments with a laser diode (655 nm) as the power source were carried out, and the data of deflection have been measured under different laser power. The experiment results prove the availability of these novel photo-thermal micro-actuators, and demonstrate that the deflection can be 11.8 μm at 10 mW laser power. This mirco-actuator doesn't need of the old power supply modes of external electric wire or small battery, and can be operated in non-focused uniform irradiation, so it has more mobility and can be controlled remotely. Furthermore, this actuator can be applied in many special environments.

This paper introduces a new method to detect drilling fluid density based on intelligent sensor, the core of which is silicon resonant sensor technology. Two H model resonant beams locating single crystal silicon resonant sensor con vert differential pressure to frequency signals respectively, then difference of two frequency signals are transmitted to CPU, export 4~20mA signal corresponding drilling fluid density after D/A converter. This method get over the short comings of typical drilling fluid density detection used piezocapacitive sensor, such as low accuracy, shattered easily, easy drift ...ect., has high precision, stability and reliability characters.

The nonlinear identification of the input-output characteristic of the eddy current sensor is an important research task in the application of the eddy current sensor. At first, the working principle and the working characteristics of the eddy current sensor were introduced in this paper. Then the nonlinear identification of the eddy current sensor was analyzed in detail. To aim at the error problem of the eddy current sensor with the nonlinear factors, a feasible project of nonlinear identification of the eddy current sensor was researched applied the modeling method of artificial neural networks, and a new artificial neural network is presented to realize the nonlinear identification of the eddy current sensor without linearization processing. Its design, modeling and implement technology based on a new internal recurrent neural networks were advanced, and then the data experiments were processed with MATLAB software, thus the measure precision of the eddy current sensor was enhanced. In the end, the measuring error is no more than 0.1%, and the dynamic responding time is less than 0.5 second. This method can increase the measuring accuracy and be advantageous for the test analysis and the data statistics though the online data processing of the computer.

The distributed optical fiber temperature measurement system (DTS) is a kind of sensing system, which is applied to the real-time measurement of the temperature field in space. It is widely used in monitoring of production process: fire alarm of coal mine and fuel depots, heat detection and temperature monitor of underground cable, seepage and leakage of dam. Through analyzing temperature effect of optical fiber Raman backscattering theoretically, a distributed temperature sensor based on single-mode fiber was designed, which overcame the inadequacies of multimode fiber. The narrow pulse width laser, excellent InGaAS PIN, low noise precision difet operational amplifier and high speed data acquisition card in order to improve the stability of this system were selected. The demodulation method based on ratio of Anti-Stokes and Stokes Raman backscattering intensity was adopted. Both hardware composition and software implementation of the system were introduced in detail. It is proved that its distinguishing ability of temperature and space are 1 m and 2 m, respectively. The system response time is about 180 s, with a sensing range of 5 km and the temperature measurement range 0~100 °C.

In order to raise the stress measurement sensitivity based on magnetoelastic effect, a new kind of whole differential magnetoelastic stress sensor with five magnetic poles is designed. First the author introduced the basic sensor structure, the size parameter and the choice of the magnetic core material, and then according to the magnetoelastic effect carried on analysis to the work principle of the sensor, making use of electromagnetism and principle of superposition again inferred the sensor voltage output equation as well as the current sensitivity formula. Finally, the author make a actually measure, and the test result indicated that the actual torques tested by using the magnetoelastic stress sensor made by author with the result of calculation is consistent. Compared with other magnetoelastic stress sensors, the sensor designed by author has simple structure, is easier to manufacture, more precise and sensitive. These characteristics can satisfy the request of engineering application and it is the worth to popularize.

A method of measure the information of three-dimensional force tactile sensing based on flexible pressure sensitive conductive rubber has been presented. The conductive mechanism and piezoresistivity of flexible pressure sensitive conductive rubber ware analyzed. A new type three dimensional force net array structure of flexible tactile sensor of robot sensitive skin has been designed. The mechanics model of the three-dimensional force has been found. Through experimental study the three-dimensional force based on the tactile sensor units, the change output resistances of pressure sensitive conductive rubber of sensor array unit have been obtained under action of three dimensional forces. All which provided the effective basis for the confirmation experiment result and the new structural design. The results show that pressure-sensitive conductive rubber with fine electrical and mechanical properties for flexible tactile sensors. The robot sensitive skin using this material feels like the skin of human being and measure the information of multi-dimensional force.

A method to retrieve small phase aberration from a single far-field image is proposed. It only needs to calibrate the inherent aberration of the imaging system once, and then the difference between a single measured image with aberration and the calibrated image with inherent aberration is got to retrieve the disturbed phase aberration by an approximate linear relationship. Computer simulations are employed to analyze the performance of this linear phase retrieval (LPR) wave-front sensor. The dynamic range of this method is discussed without noise to judge how small it is needed to satisfy the method. The results show that the proposed small phase retrieval method works well when the RMS phase error is less than 1.6 rad. The Linear Phase Retrieval wave-front sensor and the Hartmann-Shack wave-front sensor are compared on the same stochastic wave-front aberration. The influence of different calculation condition on the retrieval results is compared and analyzed. After analyzing the target resolution, it is thought that a reasonable target size is advantageous to the retrieval precision. At the same time, the LPR sensor can realize the alike precision measurement by using less detect cell, such as 8 pixelx8 pixel in our experiment. From the retrieval results of different orders, the error rate are less than 0.25 and it is comparatively accurate to retrieve pre-35 order aberrations.

Detection principle of tension sensor for diamond string bead wire is introduced. Its calibration is carried out. Analysis of sensor performance shows that it can meet the design requirement. Its main specification includes: the measurement range is 0~3000N, the accuracy is less than 0.5% FS, the non- linearity is less than 0.2% FS, the delay is less than 0.01% FS; and the repetition is less than 0.05% FS. The tension sensor can accurately and reliably measure tension of diamond string bead wire. Thus, working process of diamond wire saw can be controlled according to tension condition of string bead wire, and it is favorable to improve efficiency of diamond wire saw. The sensor has good waterproof and shockproof capability, so it can safely and stably work under water.

In this work a novel method is proposed for the sensor calibration, by combining Recurrent Neural Network (RNN) with feature extraction. RNN is used as the neural network model trained to calibrate the measuring error, while Kernel Independent Component Analysis (KICA) and Independent Component Analysis (ICA) are introduced in as the feature extraction as comparison. And by examining the data of an example of temperature sensor calibration of Agilent 34970, it is shown that the proposed methods can both perform good calibration comparing with single RBF method. And the KICA method performs better than the ICA method.

A sapphire fiber thermometer for high temperature measurement is described. The mechanism of the fluorescence temperature measurement is based on the basic physical phenomenon of photoluminescence. The so-called photoluminescence essentially is the superthermal radiation luminescence when some materials are stimulated by ultraviolet, visible or a certain form of the infrared electromagnetic radiation. The fluorescence lifespan and fluorescence strength of all fluorescence materials will imply some temperature correlation within some homologous temperatures. It uses a specially grown sapphire fiber as thermometer probe. The end part of the sapphire fiber is doped with Cr3+ion by means of the laser heat pedestal growth (LHPG) method and coated with some high radiant material to constitute a mini fiber cavity. The fluorescence thermal probe offers the advantages of a compact structure, a high performance and the ability to withstand high temperatures in detection. According to the surface temperature, we can obtain the inner temperature by the temperature field. It can be used to measure the steel fluid of the tundish in continuous cast steel machines. An experimental system of the thermometer and the preliminary experimental results are presented.

A self-diagnosis method for hot film airflow mass microsensor has been developed for the vehicle air intake. Based on the theory of heat transfer and airflow mass rate measurement for internal combustion engines, a hot film airflow mass microsensor with self-diagnosis capability is designed. It is composed of a heat sensing unit, a temperature sensing unit using a Heraeus silicon, a signal processor, a converters, a heater, a heating controller and a computer. The temperature sensing unit is split into a heater upstream temperature sensing resistor and a heater downstream temperature sensing resistor according to the air intake flow direction. From both theory and experiments, the relation between the heat transfer rate of the heater and the airflow mass rate at the air intake are deduced under the working conditions of a certain engine, and the temperature distribution rules in the heater surface, heater upstream and heater downstream are obtained. These relations are regarded as a reference model for the self-diagnosis in the microsensor. Finally, the failure of the microsensor can be detected by comparing the real-time measurement model with the reference model. Thus, this method can not only measure mass airflow rates in real time, but also inspect diagnosis faults of the heat sensing unit and the temperature sensing unit automatically.

A detailed analysis of the principle of Shack-Hartmann wavefront sensor is presented. Typical performance metrics such as dynamic range, sensitivity, repeatability and accuracy are defined and discussed. A method with which to calibrate a Shack-Hartmann wavefront sensor for absolute wavefront measurement for tilt without any accessorial apparatus is studied, and the method is tested by experiment.

The Raman lidar technique has the capability of accurately profiling the extinction coefficient of aerosol. A Mie-Raman lidar was developed for measuring the optical properties of atmospheric aerosol, such as extinction coefficient, volume backscatter coefficient and lidar ratio. The vibrational Raman signal of nitrogen and Mie-Rayleigh scattering signal are separated spatially by use of the high-resolution grating and narrow bandpass filters, and then detected by two photomultiplier tubes with a pre-amplifier. Preliminary experiments show that the Mie-Raman lidar system operated in analog detection mode has the capability of measuring aerosol profiles up to a height of 3km with 250mJ of laser energy and 8 minute integration time.

A rotational Raman lidar system at a wavelength of 355 nm has been developed for measuring the vertical temperature profile of the planetary boundary layer in the lower troposphere. A high-resolution grating is employed with two sets of narrowband interference filters to suppress the elastic Mie- and Rayleigh-scattering signals and to separate two rotational Raman signals for temperature retrieval. The central wavelength of two interference filters are located at 353.9 nm and 352.5 nm, respectively, in which wavelength temperature coefficients of rotational Raman spectral are opposite in sign. The preliminary experiments are carried out for verifying the feasibility of the prototype of the ultraviolet RRL, and the results show that the temperature sensitivity of the system is 0.43%/K and the statistical temperature errors of less then 1K are obtained up to a height of 2 km for nighttime with 300 mJ laser energy and observation time of ~8 min.

A wireless sensor network (WSN) monitoring system was designed, because of the big labour, time-consumption, and non-real-time monitoring of the true physiological data of athlete for wire communication, which were very important for their coach. The coach, who obtained the first material, can know the physiological sports status of althletes according to these data, can intervene on them and formulate a scientific training plan. The system has the characteristic of a random layout, arbitrary additions and combined network nodes. The performance of the system for 24 athletes who were trained has been tested in the system improved LEACH-c protocol and a threshold sensitive energy efficient protocol has been applied. The experimental results showed that, while the interval time of the contact was more than 15 seconds, the network packet loss rate was less than 3 percent. The operation of the network can be considered to be relatively stable. During the test, the MAC network capacity obtained by the actual tests in the implicit terminal mode was three packets per second. Considering the costs of a node sending routing maintenance packet, a network capacity of 2 was reasonable. Based on the performance of the system for testing, the results showed that the system was stable and reliable

The MAX1457 is a special sensor signal processor optimized for piezoresistibve sensor calibration and compensation. Smart compensation system is designed based on full study of MAX1457 principle. The scheme of compensation system is given. The software of smart compensation system developed by VC++ can run on any windows operating system. The parameters can be achieved automatically. Each step of compensation is guided by diagrams. The system is stabile and reliable, through field test. The issues of consistency, temperature shift and nonlinearity are solved by the system. An output error factor of silicon piezoresistive sensor is achieved within 0.2%.

To improve the precision of time grating displacement sensor and enhance its performance by software, three intelligentization methods are studied. A self-compensation method is proposed based on digital closed-loop control technology that eliminates the influences of these factors such as working condition, circuitry parameters and so on. A self-calibration method for time grating is presented that eliminates zero drift and gain drift without external high-precision reference signals. Then an error self-correction method is proposed. Experiment results conform that high stability is obtained by using self-compensation and self-calibration technology, and high precision is achieved by using self-correction technology.

Leveling of specimen surfaces is very important in measurement of surface roughness. If the surface is not leveled, the measured roughness has large distortion and less vertical measurement range. It is convenient to utilize some automatic leveling procedures instead of manual leveling which needs longer adjustment time. In automatic leveling, a new algorithm is proposed, which is named the spring method superior to the least square method. The spring method has an advantage that a part of tentative data points is used to calculate the surface inclination, so the obtained results are less influenced by local pits for example. As examples, the spring method was applied to actual engineered surfaces, which were milled, shot-peened, and ground surfaces, and also an artificial ditched surface. The results went well for the calculation of the surface inclinations and consequently the specimen surfaces were leveled with less distortion and large vertical measurement range can be achieved. It is also found the least square method is a special case of the spring method with using all sampling data points. That means the spring method is a comprehensive procedure including the least square method. This must become a very strong and robust method in automatic leveling algorithm

Since the unmanned aerial vehicles (UAVs) bring forth many innovative applications in scientific, civilian, and military fields, the development of UAVs is rapidly growing every year. The on-board autopilot that reliably performs attitude and guidance control is a vital part for out-of-sight flights. However, the control law in autopilot is designed according to a simplified plant model in which the dynamics of real hardware are usually not taken into consideration. It is a necessity to develop a test-bed including real servos to make real-time control experiments for prototype autopilots, so called hardware-in-the-loop (HIL) simulation. In this paper on the basis of the graphical application software LabVIEW, the real-time HIL simulation system is realized efficiently by the virtual instrumentation approach. The proportional-integral-derivative (PID) controller in autopilot for the pitch angle control loop is experimentally determined by the classical Ziegler-Nichols tuning rule and exhibits good transient and steady-state response in real-time HIL simulation. From the results the differences between numerical simulation and real-time HIL simulation are also clearly presented. The effectiveness of HIL simulation for UAV autopilot design is definitely confirmed

The article deals with the measurement principle and characteristics of the Y/JTG-1 Gyro-Total-Station, and calculates the Five-parameter and Three-parameter mathematical model of the gyrostatic orientation tracking surveying. Based on the calculation results and the GeoBASIC computer language, the authors compiled the smart Gyro-Total-Station orientation tracking surveying software, which is based on a TDA5005 Surveying Robot and embed in the TDA5005 by a new technology. Some measurement and calculation work, which has been completed by the controller and computer by traditional methods, can be done completely by a Total Station nowadays, so it predigests the field measurement process, improves the orientation efficiency and real time measurement. The research tested and compared the measurement precision of the Five-parameter and the Three-parameter model by field measurement and calculations.

Special tanks are important for energy source storage and transport. Based on the research of current calculation techniques for special tank capacity, a new principle and technique for special tank capacity calculations is discussed, which converts the capacity calculation into setting out and sets up a tank coordinate system. It completes all the work with a surveying robot online control mode. The new technology can calculate the tank capacity fast and precise and avoids the disadvantage of traditional measurement technology. Furthermore, special a software system is compiled, which can measure, calculate, adjust and create report tables automatically. Finally, the measurement accuracy and efficiency of the measured data are analyzed.

In switch tank, fault arcs are constant and disastrous trouble. At the present time, the protecting project of fault arcs function after generating aflame arcing, which does not avoid of generating major fault arcs. Switch tank and electric facilities must be destructed by major fault arcs. In the paper, simulation experimentations indicate that the method based on lyapunov exponents can extract arc sounds inundated background of complicate noise. With arc sounds generated before major fault arcs, the early alarm system of fault arcs is established by arc sounds, which avoids endangerment brought about by major fault arcs. There are arc sounds before generating major fault arcs. The protecting system sends out early alarm signals by detecting arc sounds. When major fault arc is generated, the protecting system sends out alarm signals by arc sounds, short circuit current and arc lights. So, the protecting system of fault arcs is established by multi-criteria. The protecting project can act as double protection to fault arcs.

In order to reduce destructive testing of car sub-assemblies, on-line inspection of weld quality has gained more and more concern in terms of both resistance spot welding (RSW) and weldbonding. Dynamic resistance directly determines the amount of heat generated by current flow and consequently reflects nugget formation and growth, which is one of the most effective technologies for quality inspection. Under the measurements of voltage and current at the secondary circuit of a welding transformer, this paper proposes a method for on-line inspection of weld quality based on two indicators from dynamic resistance curve: time to nugget initiation and durable time to nugget expansion. Firstly, during the welding process of RSW and weldbonding, the proper range of time to nugget initiation and durable time to nugget expansion for good welds is set up. Then on-line inspection of weld quality on the basis of the developed proper range of these two indicators is carried out. The experimental results show the following conclusions: it is clearly able to separate accepted welds without expulsion from the welds of unaccepted nugget size in both RSW and weldbonding; the proper range for good welds, independent of electrode wear, is obtained only for a new electrode.

An innovative nanopositioning control system is proposed in this paper. A commercial ultrasonic motor (Nanomotion Co. model HR4) is employed to generate 3-mode motions of different scales. A multi-scale positioning control scheme can thus been developed by integrating the 3 driving modes. A new displacement sensor LDGI (Linear Diffraction Grating Interferometer) is developed and served as the displacement feedback. The uncertainty of LDGI system has been proved less than 10nm in 15mm. By phase subdivision technique the resolution of LDGI can be interpolated to 0.25nm. With this hardware system a software-based controller is developed. A self-tuning module, called Back Propagation Neural Network (BPNN), is added to a PID control loop. This self-tuning PID controller shows more robust than conventional ones, especially when some unpredictable disturbance occurs. Experiments show that this system is able to reach the steady state in 2 seconds without notable overshoot or vibration and hold the position for a long time with the positioning error less than 3nm. When some disturbances occur the system can build a new steady state in 2 seconds.

Machine vision is used to assess surface roughness of work pieces in different circumstance light conditions. Different from the traditional stylus way, the machine vision method is a non-contact and non-destructive surface inspection method, and therefore has the prospect in manufacturing application. The effect of ambient light on gray-level distribution parameters was first analyzed. Then a new method, which counts the pixel numbers whose gray value is larger than sum of the Otsu threshold and a given constant, was proposed to represent different roughness. Finally some experiments were conducted to compare the proposed method with other two methods-the first is the method based on standard deviation and root mean square height of the gray-level distribution proposed by Luk, and the second is on gray-level co-occurrence matrix-to evaluate surfaces with different roughness in different conditions. The parameters, such as the constant of the proposed method, the distance and the angle of the gray-level co-occurrence matrix, were optimized to obtain better inspecting performance. Results show that the variance sum between inspecting values of the proposed method and its corresponding real surface roughness is less than half of the other two ways.

Accurate and rapid 3D position measurement is required in many industrial applications. Traditional 3D position measurements is usually applied in laboratories using coordinate measuring machine(CMM). CMM can achieve a high accuracy, but efficiency is low. Machine vision is a new technology in position measuring. Measurement based on machine vision has non-touch, high speed, high accuracy and other prominent advantages. Because depth information is lost during the process of image formation, synthesizing operation become more complicated, direct 3D position measurement based on machine vision has hardly been used in online industry application. In this paper, an indirectly online 3D position measurement system is discussed. This system is consisted with an assistant gauge, one set of machine vision system and a computer. Through the assistant gauge, 3D position measurement is transffered to 2D measurement. Thus, making full use of existing 2D image processing theory and method, accuracy and speed of measurement of 3D position measurement may be promoted effectively.

In this paper, on the basis of traditional rotor fault diagnosis and vibration measurement technology, and combined with rotor dynamics, a virtual instrument and digital signal processing technology, an online monitoring system for the rotor of a roots blower is set up. The system is made up by a sensor, a signal conditioning circuits, a data acquisition cards and a computer. By the graphical design software LabVIEW, the signals of the rotor system such as speed, amplitude, frequency and axes orbit can be monitored in the real time-domain. Regarding the rotor vibration characteristics in the time- and frequency-domain as the major fault symptoms and using spectrum analysis or time-domain analysis to deal with all data, it provides the characteristics and mapping to inform about the operating state of the rotor system. Finally, by means of the model test, the dynamic characteristics of a rub-impact rotor are analyzed, and the reliability of the system is verified.

To improve efficiency of on-line automatic inspecting auto rack girders, we recognize kinds of them in advance. This paper puts forward a vision recognition method based on wavelet transform theory and ART1. Firstly, for the real-time gathered auto rack girders images, we must carry on pretreatment of images about de-noising and enhancing, edge which is enclosed by enhanced images is partitioned to 16 regions, according to information which is position and size of holes in 16 sub-regions, gain two binary character templates which shows numbers, types and distribution of holes; Secondly, study abstract binary code with ART1, and scan up, down weights and corresponding serial number of neuron in database which consists of data of hundreds of auto rack girders. If serial numbers of output neuron are the same which is in two character templates, then this type auto rack girder is inspected. Before on-line inspecting, we gain character templates of different auto rack girders, study them with ART1. Gained the above information are saved in database, they are used as a criterion of recognition. Experiments indicate on-line maximal recognition rate meets demands of production, based on this method, and possessed advantage of more rapid and more precise recognition etc.

Because the application of spiral machinery become more and more extensive, the manufacturing and measuring technology of spiral surface, which is regarded as the key of spiral machinery, is becoming a most important research domain. With the requirement of higher speed and better performance of modern machinery, the higher precision of spiral surface is desired. So measuring technology of spiral surface seems particularly important. But it is still inconvenient for the measurement results of spiral surface from three coordinate measuring machine being directly applied for error analysis and error compensation in machining process. For the geometric characteristics, the measurement of spiral surface can be simplified the measurement of end cross-section and spiral individually. Because spiral is only relevant to lead which can be calculated precisely with simple method, spiral can be obtained analytically. Therefore, the measurement for spiral surface is practically for its end cross-section. With the end cross-section as criterion of its error evaluation, the shape of end cross-section can be obtained through two coordinate online measuring. According to the minimum condition, the error analysis for the results of reverse is done, the practical measurement points are fairly treated, and compensation is done reasonably. The aim is to realize online revision for NC program, to realize the control of machine, and thus the compensation of the tool is carried out. NC screw rod milling machine will be developed towards stronger robust, higher precision and integration with this function being integrated in the Open-architecture Numerical Control System.

This paper did a research on the uniform motion of the moving mirror in the spectrometer and the alignment with the fixed mirror. Firstly, a brief analysis is made on the factors that affect the uniform motion and the reasons of the misalignment. And then, a strategy is described to control the movement of the moving mirror that based on phase detection. Meanwhile, a detailed introduction to the strategy is presented from the aspects of the hardware design and algorithm realization. The experimental data and result shows the control system for the moving mirror has sufficient precision and timing to ensure the alignment needed by the interferometer in the FTIR spectrometer and the requirement by the moving mirror of its uniform motion as well. As one of the key techniques in the project of "Research and Development on the Fourier Transform Infrared and Laser Raman Spectrometer", one topic of the National 10th Five-year Program of Science and Technology, it will make a significant meaning in the area of precise driving and positioning, fast tracing and adjustment as well as feedback control, whether in theory or practicality.

Gas Logging is important for discovering and evaluating oil gas zones in the course of logging. Aimed at the features of gas logging in our country, a new method of automatic vacuum mud still (AVMS) is presented for the first time, which has no basic distortion of gas samples and overcomes the limitations of basic distortions caused by uncontrolled blending air in the samples in traditional degassing methods. This paper develops the theoretical basis of the system design, the working principle of AVMS, the gas flow path and its characteristics. It is proved by experimental results, that the hydrocarbon content of the sample produced by this system is ten times higher than by routine degasser. As a result, the accuracy of gas reconnaissance is improved.

The invention and manufacturing of the synthetic experiment system of machine equipment fault diagnosis filled in the blank of this kind of experiment equipment in China and obtained national practical new type patent. By the motor speed regulation system, machine equipment fault imitation system, measuring and monitoring system and analysis and diagnosis system of the synthetic experiment system, students can regulate motor speed arbitrarily, imitate multi-kinds of machine equipment parts fault, collect the signals of acceleration, speed, displacement, force and temperature and make multi-kinds of time field, frequency field and figure analysis. The application of the synthetic experiment system in our university's teaching practice has obtained good effect on fostering professional eligibility in measuring, monitoring and fault diagnosis of machine equipment. The synthetic experiment system has the advantages of short training time, quick desirable result and low test cost etc. It suits for spreading in university extraordinarily. If the systematic software was installed in portable computer, user can fulfill measuring, monitoring, signal processing and fault diagnosis on multi-kinds of field machine equipment conveniently. Its market foreground is very good.

An online measuring system can automatically detect large screw threads by using the neotype gauge head of threads, which includes a TESA inductance type transducer and a probe pin chosen according to the tooth-type of the screw thread. The contact measurement method was adopted on the basis of the synthetic measurement principle. The functional diameter of thread has experimentally been investigated and analyzed. The method of data processing is not only based on the principle of a precision measurement, but also on the principle of a dynamic test. The dynamic error is analyzed in this paper by spectrum analysis. The dynamic error is taken out and data of the functional diameter of the thread will be obtained. The analysis and the results of an actual measurement mentioned above show that the neotype gauge head of thread is capable to get the error and relative changes of the functional diameter of the screw thread. So the compatibility of saw-tooth thread can be evaluated. The system is not only suited for the test of saw-tooth thread, but also for that of other large threads with different tooth forms by using different types of probes. External threads as well as internal threads can be tested. Because the measurement strength of the neotype gauge head is much smaller than that of regular screw gauges, thus diminishing the measurement error resulting from the contact stress, the measurement precision of the gauging head can reach 1μm.

This paper intends to develop an on-line monitoring expert system for heating system fouling. It chooses pressure, flowing and temperature as basic diagnostic variables. The basic evaluative guide lines are the coefficient of flowing resistance, the efficiency and cost of heating system. This system can be used to monitor the fouling degrees and estimate the fouling positions. The expert system is programmed by Delphi to realize all functions.

In hybrid electric vehicle, engine begain to work only when motor was in high speed in order to decrease tail gas emission. However, permanent magnet motor was sensitive to its load, adding engine to the system always made its speed drop sharply, which caused engine to work in low efficiency again and produced much more environment pollution. Dynamic load torque model of permanent magnet synchronous motor is established on the basic of motor mechanical equation and permanent magnet synchronous motor vector control theory, Full- digital load torque observer and compensation control system is made based on TMS320F2407A. Experiment results prove load torque observer and compensation control system can detect and compensate torque disturbing effectively, which can solve load torque disturbing and decrease gas pollution of hybrid electric vehicle.

A kind of detection method based on principle of cone penetration test is put forward in order to rapidly get synthetical factors and section distribution curves of strength of the roadbed layer which is being measured. An on-vehicle roadbed strength testing equipment with this method is developed successfully. A computer controls the detection process and completes the data processing automatically. By the high speed of detection, online detection can be reached easily, therefore the entire course of construction of roadbed of highway and railway can be supervised to make sure quality of construction. It is proved by industrial experiment that the testing results reflect the reality of detected roadbed and potential quality problem under the surface of roadbed can be found quickly by the section distribution curve of strength of the roadbed layer. The testing equipment has passed through the technical appraisement organized by Railway Ministry.

The principle of on-machine measuring large gears with the rack-head was presented and proved. And results of measuring profile errors, straight generatrix errors were given.

Multipoint measurement technology for the thickness of bearings is one of the difficulties in testing industry of bearings. Based on optical triangulation measurement principle, a method for the multipoint measurement of bearings' thickness is presented in this paper. The measurement principle the composition and the mathematical model are presented. The real-time data record processing system is designed based on Labview. The accuracy of system was verified by experiments. The measurement accuracy of system is not more than 0.002mm.

An intelligent measure instrument of temperature and humidity was developed, which has the following functions: real-time examining, saving and showing the temperature, the humidity and the dew-point of environment, displaying dynamically date and time, and saving all data records when the power is off. It can not only dynamically draw the temperature-time curve and the humidity-time curve, but also perform the statistical analysis on the data saved by the instrument and produce a report in the Excel format. The system can calculate the maximum, the minimum, the average and the variance of the data records. The instrument communicates with the PC through the USB interface, which can be conveniently used to measure temperature and humidity in a variety of environments.

The original detecting process of leveling degree of machine-facture in foreign-funded enterprise of Singapore exists such shortcomings as being miscellaneous and trivial in numerical reading process, relatively bigger personal subjective errors and inefficient long range job intensity of labor etc. This article applies the novel laser sensor to detect the leveling degree of Machine-facture with a higher accuracy. S7-200PLC of Siemens, motion module EM253 and stepping motor are tied in wedlock to realize accurate allocation of 2-dimension of X axis and Y axis. And the result shows the system has more merits like high accuracy, nimble reliable control, low defending, strong system transplanting function and improved availability, etc. And the system has applied successfully in foreign-funded enterprise of Singapore.

Missile must lock onto its target rapidly by holographic tracking, process its tracking signal simultaneously, be controlled with high speed. This can make missile have high mobility, high accuracy and high hit rate. Holographic detector which be designed on the detection principles of infrared signal, radar signal and laser pulse signal can detect these kinds of signals, and the holographic information detected by holographic detector be coded and output can control missile's flight. Hardware circuits compose the whole design, this can not only prevent undesired signals, but also increase rate of reaction.

With the constant improvement of the Internet, Net data information acquisition of electric energy meter could be turned into reality. Based on the current electric energy meter, it could be remote controlled by adding internetwork communication module. With the well-functioned ARM kernel microprocessor being its core, the overall system of electric energy meter is managed by μC/OS-II operating system. Electric energy data could be measured and processed by adding proper hardware and software on the basis of ordinary electric energy meter, so that it could also be communicated over Ethernet. The whole Net electric energy meter is noted not only for its low cost, high stability and reliability, but also for its high practical value. Thus, a large-scale popularization and application of it will surely makes the national measure management of electric energy improve greatly.

The paper introduces a detection system of local mechanical strength of material. The principle of the system is based on the double-hole micro-shear test method. The core of detection system is MSP430F149 SCM. The working principle of the system is that the shear tool is driven by the stepper motor; the data is gathered by the load sensor and the displacement sensor; after it is processed by A/D converter of MSP430F149 SCM, we can gain the load and the displacement curve and get the maximum point of yield strength; according to the load value, the system determines the material mechanical intensity; Thus, a real-time detection system is set up. Experimental results show that detecting system based on double-hole micro-shear is fast, easy, accurate and intuitive to detect mechanical strength of the local material. So it can be widely applied to detect the local mechanical strength of kinds of mining and load bearing equipment via setting reasonable load value, which can avoid the accident of overload or super strength effectively.

Manual methods of surface defect detection and recognition on steel balls which have large workload and poor reliability are widely used in domestic manufactories. The defects of steel balls' surface have several primary categories, including pitting, scuffing, scratch and nicks. An image processing technology for automatic detection of surface defects on steel balls is proposed. The first step is image segmentation. According to defects' images which have different gray-level histogram, iterative method and mode method are adopted to make binarization. Then, a connected component labeling algorithm to sign the connected region in binary image is also presented. The following and a crucial step was feature extraction. General geometry features and moment invariant features of every connected region are calculated for recognition. Eventually, BP neural network is an efficient approach to recognize classification. Experiment show that mainly 95 percent of the surface defect categories have been classified correctly.

Being a vital manmade water-control structure, a dam plays a very important role in the living and production of human being. To make a dam run safely, the best design and the superior construction quality are paramount; moreover, with working periods increasing, various dynamic, alternative and bad loads generate little by little various distortions on the dam structure inevitably, which shall lead to potential safety problems or further a disaster (dam burst). There are many signs before the occurrence of a dam accident, so the timely and effective surveying on the distortion of a dam is important. On the basis of the cause supra, two intelligent (automatic) monitoring systems about the dam's safety based on the RTK-GPS technology and the measuring robot has been developed. The basic principle, monitoring method and monitoring process of these two intelligent (automatic) monitoring systems are introduced. It presents examples of monitor and puts forward the basic rule of dam warning based on data of actual monitor.

In this paper, inertial force of an Actuator Arm of a Hard Disk Drive (HDD) in free oscillation after an impact load is accurately measured by means of a finite element analysis and by carrying out experiments using a modified Levitation Mass Method (LMM). A 3D finite element model of an actuator arm of a HDD is modeled in ANSYS/LS-DYNA using shell elements. An impact load, which is modeled as a half sine force pulse, is applied to a mass, which is attached with the Actuator Arm. The velocity and the inertial force of the mass in free oscillation are obtained from the simulation. In the LMM method, the arm is attached to a mass, i.e. the moving part of an aerostatic linear bearing, and the total force acting on the mass is measured as the inertial force of the mass using an optical interferometer. An impact is applied to the mass with the arm by colliding it to the metal base, and the inertial force of the arm is evaluated during the free oscillation. The velocity and the inertial force of the mass are calculated from the measured time-varying Doppler frequency shift. A good correlation between the experimental and numerical results is achieved. This numerical analysis can be further used to investigate the dynamic response of the actuator arm when it is subjected to different impact load, which is modeled with half sine force pulse with different pulse widths and amplitudes.

The authors proposed "Space Scale" concept for measuring astronaut body mass in spacecraft on orbit. For the development of the flight hardware, accuracy/precision/operability verification tests under simulated microgravity are mandatory. We tested our device on a business jet flying parabolas to simulate microgravity. In addition to design constraints from microgravity, human factor engineering aspects also had to be dealt with. Methods (1) Mass was calculated based on (Mass) = (Force) x (Acceleration). (2) For Flight Test Series #1, a metal dummy mass of 9.37kg was used on parabolic flight tests. (3)For Flight Test Series #2, human subject mass was measured. (4) To eliminate acceleration noise from cabin vibration and air turbulence, data were rigorously filtered post-flight. Results With Flight Test Series #1, mass of the dummy was successfully derived with the standard uncertainty of 2.1 % for single measurement, and 0.7 % for the mean value of 12 measurements. Each measurement duration was less than 3sec., with rubber cord length reduction of 1 m. Conclusion The parabolic flight environment was a noisy acceleration field. Future studies should look more into human factor engineering aspects.

Heat from manufacturing processes like casting and heat treatment may cause localized expansion in parts. When these parts are cooled subsequently, some areas cool and contract more than others, leaving residual stresses, which may exert a considerably negative influence on both the structure's static strength and fatigue lifetime. So it is necessary to measure or predict the stress distribution in parts after heat treatment. In this study, residual stresses in the specimen are measured by ESPI (Electronic Speckle-Pattern Interferometry) combined with the hole drilling method. The material of specimen is SUS 304 austenitic stainless steel. It is quenched and water cooled subsequently. We also simulated the thermal stresses field induced by casting process by numerical analysis. As a result, comparisons of results from presented method as well as numerical solution are presented finally to give a conclusion on this residual stress measurement method in this paper.

Thick pre-stretched aluminum alloy plates are widely used in aircraft, while machining distortion caused by initial residual stress release in thick plates is a common and serious problem. To reduce the distortion, the residual stress distribution in thick plate must be measured. According to the characteristics of the thick pre-stretched aluminum alloy plate, based the elastic mechanical theory, this article deduces the modified layer-removal strain method adapting two different strain situations, which are caused by tensile and compressive stress. To validate this method, the residual stresses distribution along the thick direction of plate 2D70T351 is measured by this method, it is shown that the new method deduced in this paper is simple and accurate, and is very useful in engineering.

In the process of vibration monitoring, position error of sensors and transformation between acceleration and displacement of vibration signal may influence the accuracy of vibration monitoring. This paper presents an algorithm based on spatial vector transform and frequency domain integral. And a vibration monitoring system is also developed. Experimental results show that the vibration coupling caused by position error of sensors can be eliminated by signal transformation, which is useful to identify vibration source. Furthermore, the errors of accuracy and phase exist in conventional integral algorithm can be overcome by using frequency domain integral in the conversion between acceleration and displacement. So, higher accuracy conversion can be acquired in this way. The monitoring system can offer accurate data to distinguish the vibration state of machine tool with stable property.

The axial vibration of precision ball screw mechanism is the major factor on its positioning accuracy and noise. Many factors were contributory to the vibration, which includes the waviness of balls and groove, the friction between moving ball and groove, foreign substance in rollaway nest and the impulse during the balls entering and exiting the return mechanism and etc. In this paper, vibration experiments on pairs of ball screw mechanism which type is CD4020x1200 were performed with different speeds. The test result revealed that the vibration of the mechanism is caused by a periodically invigorative factor varying with rotating speed. Moreover, a few invigorative factors are calculated and analyzed to make sure the driving source. Combining these experiments and the theoretical analysis, it can be concluded that the impulse between the balls and return mechanism mainly causes the axial vibration of the precision ball screw mechanism.

The autoclave is one of main preparation equipments of crystal preparation by hydrothermal method. The preparation temperature will seriously influence crystals quality and crystals size at high temperature, how to measure and control precisely the autoclave temperature can be of real significance. The characteristic of hysteresis, nonlinearity and difficulty to acquire the precise mathematical model existing in the temperature control of the autoclave was researched. The general PID controller adopted usually in the autoclave temperature control system is hard to improve temperature control performance. Based on the advantages of fuzzy controller that does not depend on the precise mathematical model and the stabilization of PID controller, single-chip computer integrated fuzzy PID control algorithm is adopted, and the temperature system is designed, the foundational working principle was discussed. The control system includes SCM (AT89C52), temperature sensor, A/D converter circuit and corresponding circuit and interface, can make the autoclave temperature measure and control accurately. The system hardware includes main circuit, thyristor drive circuit, audible and visual alarm circuit, watchdog circuit, clock circuit, keyboard and display circuit so on, which can achieve gathering, analyzing, comparing and controlling the autoclave temperature parameter. The program of control system includes the treatment and collection of temperature data, the dynamic display program, the fuzzy PID control system, the audible and visual alarm program, et al, and the system's main software, which includes initialization, key-press processing, input processing, display, and the fuzzy PID control program was analyzed. The results showed that the fuzzy PID control system makes the adjustment time of temperature decreased and the precision of temperature control improved, the quality and the crystals size of the preparation crystals can achieve the expect experiment results.

Considering the potential clinical importance, the surface tension of ocular cornea under the action of normal physiological intraocular pressure is estimated, and a novel technique and a simple mechanical model for determining the tension are also presented in this paper. An instrument embodying mainly a CCD camera, an optical staff gauge and a manometer was developed primarily to measure both the surface point displacement and intraocular pressure of the cornea. A simple theoretical model was used to characterize the tensions of the ocular corneas under the action of the intraocular pressure. Due to the difficulty in obtaining the human cornea, laboratory experiments were carried out on porcine cornea specimens. The thickness of the specimens was accurately measured by optical coherence tomography. The matrix and collagen properties within the corneal tissue were manifested in the experiment. Experimental results on porcine corneas showed that the present technique is applicable to estimate the surface tension. In the normal physiological intraocular pressure range, both meridian and circumference tensions of the porcine corneas along the radial coordinate distribute are not uniform.

The experimental apparatus of cool storage air conditioning system is designed and constructed. The characteristics of cool storage air-conditioning system are experimentally measured. The temperature variation of coolant in the evaporator is presented by experiments. The refrigerant temperature in the evaporator and the compressor discharge temperature are also shown. The cool storage experiments are carried out to measure the refrigeration capacity of the chiller in cool storage mode, and the cool storage capacity in the storage tank. The measured results show that the coolant temperature difference between inlet and outlet in the evaporator, the refrigerant evaporating temperature, discharging temperature of the compressor and the refrigeration capacity of the chiller during cool storage period can maintain stable. The cool storage capacity in the storage tank approximately increases in linearity with cool storage time. This indicates the cool storage air conditioning system can stably operate.

The tolerance and fit of the hollow pieces and cylindrical pieces is an important primary standard in mechanical engineering. Current standards of tolerance and fit are based on the standard temperature 20°C. Thus the precision of the fit can be achieved only at 20°C. When the temperature changes, the diameter of a cylindrical piece and the inner diameter of a hollow piece changes, too. But the rule of thermal deformation of hollow pieces is different from the rule of cylindrical pieces. Studies on cylindrical pieces and hollow pieces in precision technology are going on and the mathematical models which are based on the approximate formula of Grueneisen have been applied. Based on this models, a theory of an optimal thermal fit is given. Designers should calculate the deviation value of hollow pieces and cylindrical pieces and adjust the tolerance of cylindrical pieces, in order to make sure, that when the temperature changes the clearance or the interference will not change. The rule of adjusting the tolerance of the cylindrical piece is described in detail. Experiments have been done to verify the optimal thermal fit theory. The deformation of the clearance of one plain bearing has been detected. The results of the experiment are presented. The uncertainty of the experimental results is about 1um. The results also show, that the clearance of the plain bearing is changing by the temperature and the value of the deformation is very close to the theoretical value. Thus, based on the experiment results, the theory of an optimal thermal fit is correct and should be used in mechanical engineering design.

This paper presented a new approach of multi-axis force/moment measurement with non-axis coupling. A floating plate of rectangular hexahedron was completely floated with flotation method. The compound force and compound moment along coordinate axes X, Y, Z were obtained by measuring the changes of pressure differential in every group air nozzle pressure cavity. The air nozzles were placed symmetrically at the turning of the floating plate, and placed symmetrically in both sides of up and down, left and right, frond and back of the floating plate with 2 in a group. The formulas to calculate the combined force and moment in the sensor along the coordinate axes X, Y, and Z were presented, and the measurement precision of the air floating force-measuring system were studied and analyzed. A set of air-suspending six-axis force/ moment sensor was developed based on this research. After experimental verification of the result of theatrical research, the result showed: the force measurement method proposed by this paper can measure compound force and compound moment along coordinate axes X, Y, Z act on the floating plate and there is no coupling during the measurement and the measurement precision is higher than multi-axis sensor based on strain gauge

In order to improve the accuracy and reliability on measuring grain loss, a research scheme of dynamic strain sensing using piezoelectric patches is put forward. Kinetic model of the grain and straw impacting sensor is analyzed by vibration theory of plates and shells, vibration model about sensitive element of the grain loss sensor is set up. The paper discusses the vibration shape and distribution of dynamic strain about low order modes of sensitive element in order to choose the sensing position of piezoelectric patches reasonably and construct piezoelectric sensor arrays. The grain and straw impacting sensor is proceeded on test bench. The analysis result is compared with the measure result obtained by the dynamic signal analyzer, the conclusion showed experiment results is well coincided with theory results. These are help to devise monitor for grain loss of combine and amend its parameters.

Magnetorheological (MR) fluids is very promising intelligent materials and it can rapidly by changed from a liquid state to a solid state in a magnetic field. Various industries are full of potential MR fluids applications, but current MR fluids have the limitation that their yield stresses are not strong enough to meet some industrial requirements. The crucial problem is how to enhance the yield stress of MR fluids. Electrorheological (ER) fluids, similar to MR fluids, can be achieved high strength under squeeze mode, which proposed a method to achieve high-efficiency MR fluids by study of shear after compression. The performance of MR fluids under squeeze-shear mode was inveatigated. Magnetic fields being generated by two coils carrying different magnitudes of DC electrical current were applied on the MR fluids when shearing after compression were carried out on a self-constructed test system. For each trail the current in the coil and the compressive force were kept constant and the instantaneous yield stress was recorded. The relations of compression stress versus compression strain, yield stress versus compression stress were studied under different applied currents. The ploting of compressive stress against compressive strain has been observed to have three regions: the first and third regions has a linear relationship and the second region has a zero increasing. The slope of the curve was found to be larger when the applied current was larger. The SG MRF2035 without compression process has a yield stress about 53kPa at most even if increasing the applied current. But after compression, the yield stress increase with the increasing compressive stress under the different applied currents. And some promising results are obtained, for example, when the applied current is 2.5A and the compressive stress is 2.0MPa, the yield stress exceeds 1100kPa. It showed that the yield stress of MR fluids after compression was much stronger than that of uncompressed MR fluids under the same applied current. The enhanced yield stress of MR fluids can be utilized to design the MR clutch and brake for new structure and will make MR fluids technology attractive for many applications.

Hybrid-Electric Vehicle (HEV) which combined the electric motor with auxiliary power unit in a car driven is introduced. Characteristic of Hybrid-Electric Vehicle are different from the other vehicle, in the structure of Hybrid-Electric Vehicle, Integrated Starter Generator (ISG) electrical system can achieve high efficient performance of driving and generating electricity simultaneously. These systems adopt the sum torque through engine and generator, the motor connected transmission through engine. According to the requirements of different conditions, the torque of motor and transmission are compound in various forms to achieve optimal driving efficiency.This study developed a dynamometer to measure the relationship between locked torques with temperature rises of an Integrated Starter Generator motor used in electrical vehicles. The dynamometer adopted an AC motor to obtain the relationship between drive and load functions, which developed in this study can perform real-time measurements and storage of measured data obtained from the dynamometer. Experiments for measuring temperature rise of ISG motor were performed at three different conditions, namely 56 Nm locked rotor torques and 18.8A locked rotor current; 57.1Nm constant torque at 1050rpm; constant power with 14.3Nm and 4050rpm, respectively. Based on the theory of temperature rise, the temperature rises of motor are 14K, 33.1K, and 16.01K for the tested cases respectively. Measured results show that the performance of motor system is satisfied with the design.

Measurement of Surface temperature in friction has became attracted extensive attention in modern industry, especially in manufacture. When the temperature in friction exceed a given value, the wear of parts will be accelerated. Some of the failed parts exhibited enormous thermal damage. Infrared thermography (ITG), sometimes called infrared(IR) imaging system, provides a quantification of the degradation in thermal performance as the machine are working and can be used to identify degrading parts for replacement before failures become immanent. A novel test technique is described in which surface temperatures were measured during tests of a rotating ring and a flat block which had a thermocouples embedded under its contact surface. The technique involves measurement of the radiation emitted by a side of the specimen immediately adjoining the ring-block contact region using a Charge Coupled Device (CCD) based ITG. By using an appropriate calibration procedure, measured radiation values are converted to temperatures. Novel aspects of the experimental technique are non-intrusive and full-field dynamic measurement at high spatial resolution and high sensitivity. This technique should facilitate study of thermal damage and multi-scale of thermal models in friction.

Electrorheological fluid is a new type of "smart" fluid. In this paper, a new type Electrorheological fluid shock absorber is designed by putting electrorheological fluid in damper as a damp medium, a fuzzy control arithmetic for this electrorheologival fluid shock absorber is designed and a fuzzy control electrorheological fluid shock absorber system is designed. Validity of this design is made sure by experiment.

A beads wire-based setup has been devised to satisfy the operation conditions of the underwater diamond wire saw. The mechanical model is established based on micro components when the string bead wire keeps stable cutting. The proper tension can be obtained according to the model under the current conditions, which provides a theoretical foundation for selecting the drive components of the annular frame design. The basic structure and the working principle of the tension sensor are introduced, and its performance index is analyzed, which meets the design demand. Tension detection test shows that the mechanical model is correct and the force feedback-based control of the radial feeding velocity is feasible, which is beneficial for working efficiency. The tension sensor is waterproof and shockproof which satisfies the demand for underwater inspection and control.

To improve the hot rolled strip quality and operational stability, a novel tensionmeter based on lever principle is developed which inspects latent waves and provides real references for flatness control in hot rolling process. The contact-type tensionmeter including two segmented rolls can get the transverse tension distribution along the strip width. Tension profile is deduced by different ratio of four force values from the embedded force sensors in tensionmeter system. The compact mechanical structure ensures the tensionmeter's robust stability in hot rolling process, standard hardware and software for data acquisition make the system easy to operate and maintain. The trails have proven tensionmeter successful in improving both strip flatness and mill performance.

A new self-measurement tonometer operated easily by the patient at home is presented in this paper. Based on the total reflection principle, a cone prism was designed as a measuring probe and associated a photoelectric transducer acting as applanation area detector converted the diminished quantity of light returned from applanation surface into one electronic signal, and a dial acting as indicator converted the applanation force of the eye into intraocular pressure. A central processing unit with the read-only memory stored the program instructions and the interrelated data. Calibration experiments were carried out on a stimulated cornea clamped in a Perspex chamber connected to a hydraulic manometer to obtain intraocular pressure at different levels. Preliminary clinical testing was carried out comparing the values obtained with those of the Goldmann tonometer. Experimental results demonstrate that the present tonometer reading has good agreement with that of the Goldmann tonometer, which can meet patient's needs.

With the rapid development of semiconductor technology the demand for high resolution measuring system is evolving at an ever-increasing pace. Microscope was initially used to detect the defect by connecting charge couple device (CCD) as an auxiliary device. In general, for microscopic measurement human eyes are used to focus on the sample. The adjustment depends on the operator's astute measurement ability, which affected the repeatability and accuracy of the readings. There is a need of high-speed microscope auto focusing system for industrial applications. The present investigation describes about the development of an autofocus system to carry out microscopic measurement more precisely and accurately with less time. The measurement system consists of a light source, two beam splitters, a movable sample stage and a Mirau's interferometer, a photo-detector and 8051 microcontroller (MCU89C51). The light reflected from the sample surface interferes with the light reflected from the reference and produce an interference pattern, which is imaged onto a CCD array. In the setup developed for the autofocus one extra beam splitter is placed in the path of interfered beam to the CCD. The beam splitter is placed at equal distances from the CCD and the photodetector. The focus position is determined from the voltage developed in the photo-detector due to the movement of sample stage of the microscope. The maximum voltage that obtained at the focus position is confirmed with the CCD image. Microcontroller is used to stop the controller at the focus position immediately once the sample stage reaches it. Software is developed to locate the maximum intensity position. The design may autofocus the interferometer within 4mm distance in 1 second. The auto-focusing not only provides enhanced repeatability and accuracy of the results at a faster rate but also minimizes operator involvement.

This paper proposes a new multiple three-step color phase-shifting method for measuring 3D shape of objects. Firstly, multiple color fringe patterns are designed and projected onto the object surface by a projector. Distorted fringe patterns on the object surface are captured by a digital camera, and intensities of each pixel in the red, green and blue channels are obtained from the captured color images. Phase values of all pixels are calculated by the phase-shifting method from the obtained RGB intensities. Then, the phase-unwrapping technique is applied to convert phase values to the height of the object surface. Finally, an integrated program is developed by combining phase-shifting process and phase-unwrapping process. With the developed program, several measurement examples are investigated. From the measurement result, it shows that better 3D shape results can be obtained from the proposed method.

In industry non-contacting measurement systems are becoming more and more a necessity. Among non-contacting techniques, optical method enjoys the virtues of being whole-field and non-contaminating and is getting more and more acceptance by industries for characterization of microsystems. In this paper, a universal digital microscopic laser speckle interferometer, which is called "Microferoscope" in the paper, is presented. The system is designed for measuring microstructures and Micro-Electro-Mechanical Systems (MEMS) with rough surface. The method is based on laser speckle interferometry incorporating a long distance microscope (LDM), a CCD-Camera and a high precision phase shifting technique. In this paper, the theory and methodology of the universal digital laser Microferoscope are described. A special software program "OPTIS" is developed for automatic data acquisition and evaluation. The usefulness of the Microferoscope is demonstrated by examples of shape and displacement measurement for different samples.

Digital Speckle Pattern Interferometry (DSPI), originally known as electronic speckle pattern interferometry (ESPI), is an interferometry based method that allows whole field, non-contacting measurement of microscopic deformation, and thus exact determination of strain distribution. This paper gives a review of the technique for three dimensional (3D) deformation and strain measurement with constant and variable measuring sensitivity, and presents the recent developments for absolute phase measurement. The theory and methodology for the developments are given. Experimental results are used to demonstrate potentials and limitations for material characterization.

This paper describes a technique for removing known repeated objects in multi-channel images. The motivation for removing known objects is to highlight un-known objects of interest. An important criterion is to base the technique on the use of image statistics and limit the use of operator supplied thresholds. The dependence on such thresholds may be subjective and is likely to be a source of error. The images used in this paper consist of transient eddy current data acquired from a multilayer aluminium alloy panel which represents a typical airframe structure. The image intensity represents the change in received eddy current magnetic field as a coil excited with a broadband waveform is scanned over the surface of the structure. The structure is held together using fasteners which are shown on the image as repeated circular objects. The regions around the fastener holes are of interest since this is where cracks in the structure may occur. Fastener objects have high variance in intensity compared to cracks and thus tend to dominate the image making identification of neighbouring cracks difficult. The removal of the known repeated objects (fasteners) highlights the un-known objects of interest (cracks). The data consists of 12 channels representing depth through the structure. Principal Value Decomposition (PVD) is to be used to reduce the number of channels that represent most of the information. The technique to remove known repeated objects involves computing the polar 2D FFT image frames. A circular object such as a fastener will produce a 2D Bessel function in frequency space. Since the object is circularly symmetric in frequency space the polar transform may be collapsed onto one axis representing radius. Zero crossings on this axis provide information on the inner and outer radius of the object. Larger frames produce grater noise from the many features present. Sub-frames can be used so that the algorithm will converge and the object radii may be measured. Correlation by multiplication in the frequency domain is used to determine the centre position of each fastener in the image with maximum signal to noise ratio. A function based on the physical process that creates the image of each fastener object is applied to the image to remove them. Two alternative techniques are presented. PVD can significantly reduce the number of channels that contain most of the information. The results show that the centre can be located and radii of each fastener can be measured, and the known image features removed to show subtle characteristics of the image not normally visible.