Optimum design of 2D micro-angle sensor

Qinggang Liu; Heng Zhao; Xiaona Lou; Ningchuan Jiang; Xiaotang Hu

doi:10.1117/12.819545

31 December 2008 Optimum design of 2D micro-angle sensor

Qinggang Liu, Heng Zhao, Xiaona Lou, Ningchuan Jiang, Xiaotang Hu

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713009 (2008) https://doi.org/10.1117/12.819545
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

To improve dynamic measurement performance and resolution, an optimum design on two-dimensional (2D) micro-angle sensor based on optical internal-reflection method via critical-angle refractive index measurement is presented in the paper. The noise signals were filtered effectively by modulating laser-driven and demodulating in signal proceeding. The system's accuracy and response speed are improved further by using 16-bit high-precision AD converter and MSP430 CPU which present with a high-speed performance during signals processes such as fitting angle-voltage curve through specific arithmetic, full range and zero point calibration, filter, scaling transformation etc. The experiment results indicated that, dynamic signal measurement range can be up to ±600arcsec, the measurement resolution can be better than 0.1arcsec, and the repeatability could be better than ±0.5arcsec.

Citation Download Citation

Qinggang Liu, Heng Zhao, Xiaona Lou, Ningchuan Jiang, and Xiaotang Hu "Optimum design of 2D micro-angle sensor", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713009 (31 December 2008); https://doi.org/10.1117/12.819545

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