31 December 2008 Optimum design of 2D micro-angle sensor
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Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713009 (2008) https://doi.org/10.1117/12.819545
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China
To improve dynamic measurement performance and resolution, an optimum design on two-dimensional (2D) micro-angle sensor based on optical internal-reflection method via critical-angle refractive index measurement is presented in the paper. The noise signals were filtered effectively by modulating laser-driven and demodulating in signal proceeding. The system's accuracy and response speed are improved further by using 16-bit high-precision AD converter and MSP430 CPU which present with a high-speed performance during signals processes such as fitting angle-voltage curve through specific arithmetic, full range and zero point calibration, filter, scaling transformation etc. The experiment results indicated that, dynamic signal measurement range can be up to ±600arcsec, the measurement resolution can be better than 0.1arcsec, and the repeatability could be better than ±0.5arcsec.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qinggang Liu, Qinggang Liu, Heng Zhao, Heng Zhao, Xiaona Lou, Xiaona Lou, Ningchuan Jiang, Ningchuan Jiang, Xiaotang Hu, Xiaotang Hu, } "Optimum design of 2D micro-angle sensor", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713009 (31 December 2008); doi: 10.1117/12.819545; https://doi.org/10.1117/12.819545

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