31 December 2008 Suspension system design study for a tuning fork vibratory MEMS gyroscope
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Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71300J (2008) https://doi.org/10.1117/12.819555
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China
Abstract
A four-degree-of-freedom gyroscope dynamical model is presented to improve the performance of a tuning fork vibratory MEMS gyroscope. The effects of the driving and sensing micromachined spring beams for the performance of the gyroscope are investigated. Two new types of micromachined spring beams named the "two-sect" driving and "three-sect" sensing spring beams are designed and their stiffness equations are deduced. The evaluation function of the dynamic performance of the gyroscope with improved suspension system can be obtained. A numerical example with finite element analysis for comparison is employed to validate the dynamical analysis. The result shows that the optimized gyroscope has good robustness and high sensitivity. The work is not only suitable for the tuning fork vibratory MEMS gyroscope, but also has an important reference value for other MEMS design of products.
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Yongpeng Wen, Anlin Wang, Tao Jiang, Zhao Liu, Guangjun Liu, "Suspension system design study for a tuning fork vibratory MEMS gyroscope", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300J (31 December 2008); doi: 10.1117/12.819555; https://doi.org/10.1117/12.819555
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