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31 December 2008 A system-level simulation of force-balance MEMS accelerometers by VHDL_AMS
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Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71300R (2008) https://doi.org/10.1117/12.819564
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China
Abstract
Micromachined accelerometers are one of the most widely used MEMS transducers. The theory of force-balance MEMS accelerometers is presented in the thesis. Meanwhile the paper accomplishes the system-level simulation and analysis of the force-balance MEMS accelerometer with different structure parameters. Based on the analysis, the conclusion is that the parameters of folded-spring (such as the length of the beam, the width of the beam) especially influence the output sensitivity.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiaochuan Tang, Yufeng Zhang, Weiping Chen, and Xiaowei Liu "A system-level simulation of force-balance MEMS accelerometers by VHDL_AMS", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300R (31 December 2008); doi: 10.1117/12.819564; https://doi.org/10.1117/12.819564
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