31 December 2008 3D measurement system of micro-organization based on two-ray-path scanning
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Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713031 (2008) https://doi.org/10.1117/12.819668
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China
Abstract
A 3D measurement system of micro organization based on two-ray-path scanning was developed. This article introduced the principle and setup of the system. Experiments were carried out to measure the three-dimensional shape of some micro organizations. The results showed that this system could measure accurately not only the thickness of each part of the micro organization, but also can show its three-dimensional shape quickly and accurately. The vertical error was less than 2 μm. This system has advantages of compact structure, accurate detection, and high reliability, and can realize nondestructive measurement of micro organization.
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Xiaolei Shan, Xiaolei Shan, Dongxian Zhang, Dongxian Zhang, Chao Liu, Chao Liu, Haijun Zhang, Haijun Zhang, } "3D measurement system of micro-organization based on two-ray-path scanning", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713031 (31 December 2008); doi: 10.1117/12.819668; https://doi.org/10.1117/12.819668
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