31 December 2008 Computer aided alignment of 20X Schwarzschild projection optics
Author Affiliations +
Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 713042 (2008) https://doi.org/10.1117/12.819705
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China
Abstract
An effective computer aided alignment (CAA) scheme based on the singular value decomposition (SVD) of sensitivity matrix is used in the alignment of a set of 20X Schwarzschild projection optics. Alignment simulation is conducted by ray tracing software CODE V to verify the convergence of CAA method within the calculated tolerance limit. The result shows that, with the misalignment value calculated by CAA, fine alignment could be achieved after only one adjustment step. Alignment experiment is also performed according to the CAA scheme. After fine alignment, the measured wavefront error (WFE) is 18nm in rms, which is consistent with the CODE V simulation result in ideal alignment status.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ke Liu, Yanqiu Li, Jingfeng Liu, Cuifang Kuang, "Computer aided alignment of 20X Schwarzschild projection optics", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713042 (31 December 2008); doi: 10.1117/12.819705; https://doi.org/10.1117/12.819705
PROCEEDINGS
6 PAGES


SHARE
Back to Top