30 December 2008 The HMDS coating flaw removal tool
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Abstract
In many high energy laser systems, optics with HMDS sol gel antireflective coatings are placed in close proximity to each other making them particularly susceptible to certain types of strong optical interactions. During the coating process, halo shaped coating flaws develop around surface digs and particles. Depending on the shape and size of the flaw, the extent of laser light intensity modulation and consequent probability of damaging downstream optics may increase significantly. To prevent these defects from causing damage, a coating flaw removal tool was developed that deploys a spot of decane with a syringe and dissolves away the coating flaw. The residual liquid is evacuated leaving an uncoated circular spot approximately 1mm in diameter. The resulting uncoated region causes little light intensity modulation and thus has a low probability of causing damage in optics downstream from the mitigated flaw site.
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M. V. Monticelli, M. V. Monticelli, M. C. Nostrand, M. C. Nostrand, N. Mehta, N. Mehta, L. Kegelmeyer, L. Kegelmeyer, Mike A. Johnson, Mike A. Johnson, J. Fair, J. Fair, C. Widmayer, C. Widmayer, } "The HMDS coating flaw removal tool", Proc. SPIE 7132, Laser-Induced Damage in Optical Materials: 2008, 71320V (30 December 2008); doi: 10.1117/12.804458; https://doi.org/10.1117/12.804458
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