Effect of probe offset on ultra-precision measurement of circular profile

Jingzhi Huang; Jiubin Tan

doi:10.1117/12.821218

12 January 2009 Effect of probe offset on ultra-precision measurement of circular profile

Jingzhi Huang, Jiubin Tan

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 71330G (2009) https://doi.org/10.1117/12.821218
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

In order to further improve the ultra-precision measuring accuracy of circular profile, the sources of probe offset error was analyzed and one-parameter measurement model was established that with probe offset parameter only, and it was concluded that probe offset has a significant effect on the measurement of an object with a small size or large profile deviation; the two-parameter measurement model that with probe offset error d and eccentricity error (e, &agr;) was simultaneously analyzed, and the accurate interaction relationship between d and e is obtained. Simulation results show that probe offset error has a significant amplifying action to eccentricity error, and the measurement error increases as probe offset error increase. This paper provides the basis for further improvement of ultra-precision measuring accuracy of circular profile.

Citation Download Citation

Jingzhi Huang and Jiubin Tan "Effect of probe offset on ultra-precision measurement of circular profile", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71330G (12 January 2009); https://doi.org/10.1117/12.821218

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