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12 January 2009 Loop-by-loop modeling of whole-closed-loop 2D high-precision motion platform
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Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 71330S (2009) https://doi.org/10.1117/12.810452
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China
Abstract
A 2D high-precision motion unit plays an important role in an automatic optical inspection (AOI) system, and its positioning accuracy and speed have an decisive effect on the inspection accuracy, efficiency and stability of the AOI system, but the present AOI systems cannot ensure the high speed and high-precision at the same time. To solve this problem, an automatic optical platform is developed, using the whole-closed-loop, fast, high-precision positioning technology to construct the mathematical models of its motion control unit, including models of current loop, velocity loop and position loop from inside to outside. Experiments were made on the motion platform using a laser interferometer. Experimental results show that the 2D motion platform can be used to reach a scanning speed of 20m/s and a positioning accuracy of 9ìm in a work area of 300mm * 3000mm with a load of 5kg.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shu-liang Ye, Dong-sheng Li, Tian-tai Guo, Lin Fu, and Wei Xu "Loop-by-loop modeling of whole-closed-loop 2D high-precision motion platform", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 71330S (12 January 2009); https://doi.org/10.1117/12.810452
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