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12 January 2009 Sputter deposited zinc oxide photoconductive antenna for terahertz time-domain spectroscopy
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Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 713315 (2009) https://doi.org/10.1117/12.807260
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China
Abstract
In this paper, we report on the design and fabrication of zinc oxide (ZnO) photoconductive antenna for a terahertz (THz) pulse emitter and detector, and its integration with scanning near-field optical microscopy probe. The fabricated ZnO photoconductive antennas are evaluated in a THz time-domain spectroscopy measurement system. The resistivity of ZnO deposited by rf sputter at the room temperature was 9.6..104 ·cm. The bandwidth of ZnO photoconductive antenna was up to 1 THz.c
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Kentaro Iwami, Takahito Ono, and Masayoshi Esashi "Sputter deposited zinc oxide photoconductive antenna for terahertz time-domain spectroscopy", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713315 (12 January 2009); https://doi.org/10.1117/12.807260
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