Design and fabrication of SU-8 polymer-based micro-racetrack resonators

Daoxin Dai; Bo Yang; Liu Yang; Zhen Sheng

doi:10.1117/12.804181

11 November 2008 Design and fabrication of SU-8 polymer-based micro-racetrack resonators

Daoxin Dai, Bo Yang, Liu Yang, Zhen Sheng

Proceedings Volume 7134, Passive Components and Fiber-based Devices V; 713414 (2008) https://doi.org/10.1117/12.804181
Event: Asia-Pacific Optical Communications, 2008, Hangzhou, China

Abstract

By using small SU-8 polymer ridge waveguides, compact micro-racetrack resonator (MRR) add-drop filters are presented. This used small ridge waveguide has an air-cladded SU-8 polymer core (n~1.573) on a SiO2 buffer (n~1.445) so that the bending radius could be as small as ~102μm. Considering the resolution limitation of a regular UV-lithography process, the gap in the coupling region of the present MRR in our design is no less than 1.0 μm. In order to enhance the coupling between the access optical waveguide and the micro-racetrack, narrow optical waveguides are used in the coupling regions. Meanwhile, wide optical waveguides are used in the bending sections to have a small bending radius. And a single-side taper is used to connect these two sections with different widths so that the gap width is kept as small as 1.0 μm in the whole region. With a regular UV lithography process, the designed micro-racetrack resonator (MRR) add-drop filters are fabricated. The measured propagation loss for straight waveguides is about 0.1dB/mm and the measured spectral responses of the through/drop ports show a Q-factor of 8000.

Citation Download Citation

Daoxin Dai, Bo Yang, Liu Yang, and Zhen Sheng "Design and fabrication of SU-8 polymer-based micro-racetrack resonators", Proc. SPIE 7134, Passive Components and Fiber-based Devices V, 713414 (11 November 2008); https://doi.org/10.1117/12.804181

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