4 December 2008 Application automatic focusing with DVD pickup head in FPD substrate inspection
Author Affiliations +
Proceedings Volume 7140, Lithography Asia 2008; 71403H (2008) https://doi.org/10.1117/12.804464
Event: SPIE Lithography Asia - Taiwan, 2008, Taipei, Taiwan
This study proposes an integrated optical system for flat panel display (FPD) substrate inspection. For such a system, auto-focusing is a challenging problem since the microscope magnification ratio is as large as 10X to 50X and the corresponding depth of field (DOF) can thus reduced to 5 µm. Considering its low-cost and its capability in maintaining the depth of field that may be deteriorated by the increase of magnification ratio, this work uses the digital versatile disc (DVD) pickup head is used as the auto-focusing sensor. To verify the auto focus can be achieved. We construct experiment to simulate the real vibration. Change different position from lens to FPD substrate DVD calculate focus error signal (FES) to control PZT stage return to focus position immediately in 0.5 sec.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. M. Tseng, C. M. Tseng, C. Y. Chung, C. Y. Chung, S. C. Chiu, S. C. Chiu, C. W. Yen, C. W. Yen, "Application automatic focusing with DVD pickup head in FPD substrate inspection", Proc. SPIE 7140, Lithography Asia 2008, 71403H (4 December 2008); doi: 10.1117/12.804464; https://doi.org/10.1117/12.804464


A sensitive optical probe for surface topography based on an...
Proceedings of SPIE (September 04 2014)
Fast evaluation of surface sensitivity on ghost
Proceedings of SPIE (September 22 2015)
Surface profile measurement using a CD optical pickup head
Proceedings of SPIE (October 29 2001)
Photometric ranging and 3-D vision
Proceedings of SPIE (July 31 1990)

Back to Top