20 November 2008 Influence of surface roughness on the measurement uncertainty of white-light interferometry
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Proceedings Volume 7141, 16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 71410R (2008) https://doi.org/10.1117/12.822372
Event: 16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2008, Polanica Zdroj, Poland
Abstract
White-light interferometry measuring on rough surface commonly does not resolve the lateral structure of the surface. Thus the height differences within one resolution cell of the imaging system can exceed one-fourth of the wavelength of the used light. Consequently the phase of the interferogram, which is recorded at the interferometer's output during the depth scan, becomes a random variable. In the image plane of the imaging system, a speckle pattern arises. Therefore in white-light interferometry on rough surface, the phase is not evaluated and the zero path difference is determined by seeking the maximal contrast of the interference fringes. Because of the rough surface, the measured value of the height coordinate is the result of a statistical process. In this way the rough surface gives rise to a measurement error. By means of numerical simulations we determine, how the surface roughness influences the measurement uncertainty of whitelight interferometry.
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Pavel Pavlíček, Pavel Pavlíček, } "Influence of surface roughness on the measurement uncertainty of white-light interferometry", Proc. SPIE 7141, 16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 71410R (20 November 2008); doi: 10.1117/12.822372; https://doi.org/10.1117/12.822372
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