Paper
2 December 2008 Laser structuring of conducting films on transparent substrates for electronics devices
Author Affiliations +
Proceedings Volume 7142, Sixth International Conference on Advanced Optical Materials and Devices (AOMD-6); 714207 (2008) https://doi.org/10.1117/12.815322
Event: Sixth International Conference on Advanced Optical Materials and Devices, 2008, Riga, Latvia
Abstract
Flat panel displays (FPD), flexible electronics and thin-film photovoltaics are booming in the last few years. Permanent annual growth and huge expectations in the market in the near future stimulate the development of versatile technologies for patterning thin-film materials on rigid and flexible substrates. Utilization of laser radiation provides diversity of processing means for structuring deposited films. The high selectivity and diminishing effect on the surrounding material as well as high speed are required in processing complex multilayered systems in the thin-film photovoltaics. Organic electronics imposes special requirements on the geometrical quality of conductors. The current situation with laser direct writing of thin-films in the production of FPD and solar cells as well as our results are presented. High repetition rate lasers with a short pulse duration offer new possibilities for high efficiency structuring of conducting, semi-conducting and isolating films. Laser structuring with the picosecond and nanosecond pulse duration was applied in shaping the thin films deposited on polymers and glass substrates. Absorption of laser radiation by the film material was essential to initiate its controllable removal. Use of UV laser radiation with fluences close to the ablation threshold made it possible to minimize surface contamination and the recast ridge formation during the ablation process. The flexible technique of patterning was applied in prototyping the components for the OLED matrix, RFID antennas and the thin-film solar cells. Well-defined shapes of isolating trenches and conductor lines were produced by laser ablation with the picosecond pulse duration.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. Račiukaitis "Laser structuring of conducting films on transparent substrates for electronics devices", Proc. SPIE 7142, Sixth International Conference on Advanced Optical Materials and Devices (AOMD-6), 714207 (2 December 2008); https://doi.org/10.1117/12.815322
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Cited by 2 scholarly publications.
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KEYWORDS
Laser ablation

Glasses

Molybdenum

Laser processing

Absorption

Copper indium gallium selenide

Pulsed laser operation

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