Structure measurement of phase grating on post-magnification digital micro-holography

Wenjing Zhou; Yingjie Yu; Anand Asundi

doi:10.1117/12.814508

3 October 2008 Structure measurement of phase grating on post-magnification digital micro-holography

Wenjing Zhou, Yingjie Yu, Anand Asundi

Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71550A (2008) https://doi.org/10.1117/12.814508
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore

Abstract

It develops a digital micro-holographic optical system to record the magnified hologram (named post-magnification digital micro-holography in this paper), which can suppress the quadratic phase aberration introduced by micro-objective (MO) and the wave-front difference between the object wave and reference wave. In order to show its remarkable trait, post-magnification micro-holography is compared with the traditional digital micro-holography (DMH) (named pre-magnification DMH) from the view of digital processing and aberration eliminating. Their differences are also analyzed by the measurement results of a phase grating with period 30lines/mm and depth 0.3 μm. Fresnel approximation algorithm is used to reconstruct the phase-contrast one of this phase grating. The results show that the presented system is greatly helpful to restrain the quadratic phase error.

Citation Download Citation

Wenjing Zhou, Yingjie Yu, and Anand Asundi "Structure measurement of phase grating on post-magnification digital micro-holography", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71550A (3 October 2008); https://doi.org/10.1117/12.814508

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