Phase measurement via in-line digital holographic microscopy

Weijuan Qu; Yingjie Yu; Wenjing Zhou; Hao Yan; Anand Asundi

doi:10.1117/12.814526

Translator Disclaimer

3 October 2008 Phase measurement via in-line digital holographic microscopy

Weijuan Qu, Yingjie Yu, Wenjing Zhou, Hao Yan, Anand Asundi

Author Affiliations +

Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71550R (2008) https://doi.org/10.1117/12.814526
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore

Abstract

In-line digital holographic microscopy as a phase measurement tool for the inspection of micro-components is presented. Light diffracted by the micro-components interferes with the directly propagating beams to give the in-line digital hologram recorded by the CCD camera. The convolution method is used to calculate the diffractive propagation of the light in order to reconstruct the wavefront of the test specimen. A reference hologram without the test specimen is recorded for the phase reconstruction. Finally, the method is applied on a phase grating to test its refractive index of the coating material.

Citation Download Citation

Weijuan Qu, Yingjie Yu, Wenjing Zhou, Hao Yan, and Anand Asundi "Phase measurement via in-line digital holographic microscopy", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71550R (3 October 2008); https://doi.org/10.1117/12.814526

ACCESS THE FULL ARTICLE