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3 October 2008Phase measurement via in-line digital holographic microscopy
In-line digital holographic microscopy as a phase measurement tool for the inspection of micro-components is presented.
Light diffracted by the micro-components interferes with the directly propagating beams to give the in-line digital
hologram recorded by the CCD camera. The convolution method is used to calculate the diffractive propagation of the
light in order to reconstruct the wavefront of the test specimen. A reference hologram without the test specimen is
recorded for the phase reconstruction. Finally, the method is applied on a phase grating to test its refractive index of the
coating material.