Study on topography measurement of ultra-smooth surface

Yuhe Li; XiaoLei Tong; Haoshan Lin; Huiyu Li; Qingxiang Li

doi:10.1117/12.814593

3 October 2008 Study on topography measurement of ultra-smooth surface

Yuhe Li, XiaoLei Tong, Haoshan Lin, Huiyu Li, Qingxiang Li

Proceedings Volume 7155, Ninth International Symposium on Laser Metrology; 71552J (2008) https://doi.org/10.1117/12.814593
Event: Ninth International Symposium on Laser Metrology, 2008, Singapore, Singapore

Abstract

With the development of super precision machining technology, the requirement for the precision of super-smooth surfaces measurement has reached ever-higher levels. In this paper, we adopt the phase-shifting interferential microscope technology, and present a kind of algorithm called Geodesic Erosion which aims at eliminating noises in the wrapping phase image such as abrupt phase changes, holes, points with low modulation, etc. Experiments show that the system is effective to remove noises in the wrapping phase image and successful to achieve the unwrapping phase image. The accuracy of this system may attain nanometer magnitude, while can also meet the topography measurement requirement for the super-smooth surfaces perfectly.

Citation Download Citation

Yuhe Li, XiaoLei Tong, Haoshan Lin, Huiyu Li, and Qingxiang Li "Study on topography measurement of ultra-smooth surface", Proc. SPIE 7155, Ninth International Symposium on Laser Metrology, 71552J (3 October 2008); https://doi.org/10.1117/12.814593

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