2 February 2009 Multiply phase-shifted Fizeau interferometric sensor with a tunable laser diode
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Abstract
With a newly-developed 16-sample wavelength-shifting algorithm, Fizeau phase-shifting interferometry with a laser diode (LD) suppresses alignment errors in a test plate. This phase-shifting algorithm includes the elimination of phase errors due to changes in laser power by LD currents. The measurement phase errors on a 16-sample phase-extraction algorithm are numerically and experimentally estimated. The surface-profile measurement of a plane-parallel plate is experimentally shown free from systematic errors.
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Sayaka Idoi, Sayaka Idoi, Hayato Fujita, Hayato Fujita, Masayuki Kagawa, Masayuki Kagawa, Hideki Funamizu, Hideki Funamizu, Yukihiro Ishii, Yukihiro Ishii, } "Multiply phase-shifted Fizeau interferometric sensor with a tunable laser diode", Proc. SPIE 7157, 2008 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications, 71571P (2 February 2009); doi: 10.1117/12.816124; https://doi.org/10.1117/12.816124
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